JPS55125676A - Pressure transducer - Google Patents

Pressure transducer

Info

Publication number
JPS55125676A
JPS55125676A JP3282979A JP3282979A JPS55125676A JP S55125676 A JPS55125676 A JP S55125676A JP 3282979 A JP3282979 A JP 3282979A JP 3282979 A JP3282979 A JP 3282979A JP S55125676 A JPS55125676 A JP S55125676A
Authority
JP
Japan
Prior art keywords
deforming portion
elements
diameter
transducer
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3282979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222468B2 (enrdf_load_html_response
Inventor
Teizo Takahama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP3282979A priority Critical patent/JPS55125676A/ja
Publication of JPS55125676A publication Critical patent/JPS55125676A/ja
Publication of JPS6222468B2 publication Critical patent/JPS6222468B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP3282979A 1979-03-20 1979-03-20 Pressure transducer Granted JPS55125676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3282979A JPS55125676A (en) 1979-03-20 1979-03-20 Pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3282979A JPS55125676A (en) 1979-03-20 1979-03-20 Pressure transducer

Publications (2)

Publication Number Publication Date
JPS55125676A true JPS55125676A (en) 1980-09-27
JPS6222468B2 JPS6222468B2 (enrdf_load_html_response) 1987-05-18

Family

ID=12369706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3282979A Granted JPS55125676A (en) 1979-03-20 1979-03-20 Pressure transducer

Country Status (1)

Country Link
JP (1) JPS55125676A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62158367A (ja) * 1985-12-28 1987-07-14 Anritsu Corp 圧力センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159982A (enrdf_load_html_response) * 1974-06-14 1975-12-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159982A (enrdf_load_html_response) * 1974-06-14 1975-12-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62158367A (ja) * 1985-12-28 1987-07-14 Anritsu Corp 圧力センサ

Also Published As

Publication number Publication date
JPS6222468B2 (enrdf_load_html_response) 1987-05-18

Similar Documents

Publication Publication Date Title
US3820401A (en) Piezoresistive bridge transducer
JPS55125676A (en) Pressure transducer
JPS562671A (en) Manufacture of semiconductor diaphragm
JPS5627630A (en) Pressure sensitive element
JPS53126880A (en) Silicon diaphragm type strain gauge
JPS5444883A (en) Semiconductor pressure converter
JPS5643771A (en) Semiconductor pressure sensor
JPS55103441A (en) Pressure converter
JPS5515133A (en) Production of plane diffraction grating
JPS56148870A (en) Semiconductor presssure converter
JPS5425683A (en) Pressure transmitter of semiconductor
JPS57204176A (en) Semiconductor pressure converter
JPS532085A (en) Manufacture of mis-type semiconductor device
JPS54162492A (en) Semiconductor pressure transducer
JPS5383485A (en) Diffusion type semiconductor pressure transducer
JPS53121491A (en) Pressure sensor
JPS5252566A (en) Production of semiconductor element
JPS57186136A (en) Semiconductor pressure transducer
JPS52127166A (en) Manufacture of semiconductor
SU549053A1 (ru) Полупроводниковый датчик давлени
JPS5527670A (en) Pressure-electric signal converter
JPS52134376A (en) Production of semiconductor device
JPS5338986A (en) Semiconductor negative resistance element
JPS535588A (en) Manufacture of piezoelectric oscillator
JPS54149486A (en) Pressure-sensitive element