JPS55125629A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
JPS55125629A
JPS55125629A JP3368879A JP3368879A JPS55125629A JP S55125629 A JPS55125629 A JP S55125629A JP 3368879 A JP3368879 A JP 3368879A JP 3368879 A JP3368879 A JP 3368879A JP S55125629 A JPS55125629 A JP S55125629A
Authority
JP
Japan
Prior art keywords
signal
counter
electron beam
inputted
correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3368879A
Other languages
Japanese (ja)
Inventor
Hideo Kusakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3368879A priority Critical patent/JPS55125629A/en
Publication of JPS55125629A publication Critical patent/JPS55125629A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To accomplish a ready and highly accurate detection of the deflection width of the electron beam by determining the distance between the correction marks through computation of the detection information obtained from the irradiation of electron beam on the sample with the deflected scanning start point being repeatedly deviated by a slight distance. CONSTITUTION:Upon reception of a correction start signal ST, FFs 14 and 15 are set to actuate a counter 11 to count the reference clock of a quartz oscillator 18. When the discrete value of the counter reaches the set value A of a register 20, a comparator 19 transmits the signal to reset the FF15, while the signal is inputted into a counter 12. When the discrete value of the counter 12 reaches a set value B, a comparator 24 transmits to set the FF15. As a flyback signal, the output of the FF15 is inputted into the deflection circuit, which deviates the deflection scanning startpoint of the electron beam by a slight distance. On the other hand, the detection signal of the correction mark obtained through a detector is converted into binary in a quantum circuit 29 and inputted into a memory 34 via FFs 32 and 33. CPU computes the information of the memory 34 and the counting of counters 11 and 13 to determine the distance between the correction marks.
JP3368879A 1979-03-22 1979-03-22 Electron beam apparatus Pending JPS55125629A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3368879A JPS55125629A (en) 1979-03-22 1979-03-22 Electron beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3368879A JPS55125629A (en) 1979-03-22 1979-03-22 Electron beam apparatus

Publications (1)

Publication Number Publication Date
JPS55125629A true JPS55125629A (en) 1980-09-27

Family

ID=12393359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3368879A Pending JPS55125629A (en) 1979-03-22 1979-03-22 Electron beam apparatus

Country Status (1)

Country Link
JP (1) JPS55125629A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04218425A (en) * 1991-03-27 1992-08-10 Honda Motor Co Ltd Car ventilator
WO2000062920A1 (en) * 1999-04-19 2000-10-26 Water Systems Integrators, Llc Apparatus and method for treating liquids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04218425A (en) * 1991-03-27 1992-08-10 Honda Motor Co Ltd Car ventilator
WO2000062920A1 (en) * 1999-04-19 2000-10-26 Water Systems Integrators, Llc Apparatus and method for treating liquids

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