JPS56138206A - Displacement measuring equipment - Google Patents

Displacement measuring equipment

Info

Publication number
JPS56138206A
JPS56138206A JP4272280A JP4272280A JPS56138206A JP S56138206 A JPS56138206 A JP S56138206A JP 4272280 A JP4272280 A JP 4272280A JP 4272280 A JP4272280 A JP 4272280A JP S56138206 A JPS56138206 A JP S56138206A
Authority
JP
Japan
Prior art keywords
image
displacement
reference signal
pulse
douser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4272280A
Other languages
Japanese (ja)
Inventor
Toshiji Kojima
Kenji Matsumaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP4272280A priority Critical patent/JPS56138206A/en
Publication of JPS56138206A publication Critical patent/JPS56138206A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To make it possible to measure displacement of the surface by use of a regular photodetecting element, by making a light beam irradiate the surface of an object, forming an image by its reflected ray, and detecting displacement of the image, which is accompanied by that of the surface, by means of a regularly reciprocating douser. CONSTITUTION:A light beam from the light source 11 is made to irradiate an object to be measured A, a light spot P is formed, and an image Q is formed by the reflected ray. A regularly reciprocating dousing means 16 is provided so as to conform with a moving locus of the image Q. As for this means 16, a douser 18 having a slit 17 oscillates in a sine wave by the tuning fork 20. In this constitution, oscillation of the means 16 is monitored by the reference signal generating circuit 23, and a reference signal is output. On the other hand, the signal by which the photodetector 21 has detected the image Q through the slit 17 outputs a pulse when photodetection has been varied, by the sampling pulse generating circuit 26. In accordance with this pulse, the circuit 27 sample-holds the reference signal, and outputs an instantaneous value output showing displacement of the image Q, to the measuring instrument 29. In this way, displacement can be measured by use of a regular photodetecting element.
JP4272280A 1980-03-31 1980-03-31 Displacement measuring equipment Pending JPS56138206A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4272280A JPS56138206A (en) 1980-03-31 1980-03-31 Displacement measuring equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4272280A JPS56138206A (en) 1980-03-31 1980-03-31 Displacement measuring equipment

Publications (1)

Publication Number Publication Date
JPS56138206A true JPS56138206A (en) 1981-10-28

Family

ID=12643952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4272280A Pending JPS56138206A (en) 1980-03-31 1980-03-31 Displacement measuring equipment

Country Status (1)

Country Link
JP (1) JPS56138206A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5733308A (en) * 1980-07-23 1982-02-23 Gen Electric Optical triangulation apparatus and method
JPS58106410A (en) * 1981-12-21 1983-06-24 Seiko Koki Kk Distance detector
JPS58120110A (en) * 1982-01-11 1983-07-16 Seiko Koki Kk Control circuit in light projecting type distance measuring device
US4752129A (en) * 1985-03-27 1988-06-21 Anritsu Corporation Wavelength modulation derivative spectrometer
WO1990013001A1 (en) * 1989-04-19 1990-11-01 Fanuc Ltd Optical distance sensor
JPH03102210A (en) * 1990-04-27 1991-04-26 Seikosha Co Ltd Projecting-type distance measuring apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5733308A (en) * 1980-07-23 1982-02-23 Gen Electric Optical triangulation apparatus and method
JPS58106410A (en) * 1981-12-21 1983-06-24 Seiko Koki Kk Distance detector
JPS58120110A (en) * 1982-01-11 1983-07-16 Seiko Koki Kk Control circuit in light projecting type distance measuring device
JPH0419487B2 (en) * 1982-01-11 1992-03-30 Seikosha Kk
US4752129A (en) * 1985-03-27 1988-06-21 Anritsu Corporation Wavelength modulation derivative spectrometer
WO1990013001A1 (en) * 1989-04-19 1990-11-01 Fanuc Ltd Optical distance sensor
JPH03102210A (en) * 1990-04-27 1991-04-26 Seikosha Co Ltd Projecting-type distance measuring apparatus
JPH0439015B2 (en) * 1990-04-27 1992-06-26

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