JPS55110028A - Apparatus for vacuum evaporation having evaporation source for ion beam sputtering - Google Patents

Apparatus for vacuum evaporation having evaporation source for ion beam sputtering

Info

Publication number
JPS55110028A
JPS55110028A JP1764879A JP1764879A JPS55110028A JP S55110028 A JPS55110028 A JP S55110028A JP 1764879 A JP1764879 A JP 1764879A JP 1764879 A JP1764879 A JP 1764879A JP S55110028 A JPS55110028 A JP S55110028A
Authority
JP
Japan
Prior art keywords
vacuum
evaporation
chamber
source
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1764879A
Other languages
Japanese (ja)
Inventor
Hiroichi Deguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP1764879A priority Critical patent/JPS55110028A/en
Priority to GB8003934A priority patent/GB2043003A/en
Priority to IT19806/80A priority patent/IT1148753B/en
Priority to FR8003408A priority patent/FR2449021A1/en
Publication of JPS55110028A publication Critical patent/JPS55110028A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62D—MOTOR VEHICLES; TRAILERS
    • B62D55/00—Endless track vehicles
    • B62D55/08—Endless track units; Parts thereof
    • B62D55/096—Endless track units; Parts thereof with noise reducing means

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Gears, Cams (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To provide an apparatus for evaporation having advantages of both the vacuum and the sputtering methods, by installing an evaporation source of the sample-heating method and that of the ion beam sputtering in one vacuum chamber, or arranging each source in the different vacuum chamber.
CONSTITUTION: When two evaporation sources are installed in one vacuum chamber, a substrate holder 3 capable of revolution and rotation is arranged in the upper part of a vacuum vapor deposition chamber 1 which has a large exhaust system 2. An evaporation source 4 of the sample-heating method and a target 9 are installed on the bottom of the chamber 1. An ion gun 5 having a gas inlet 7 and a variable leak valve 6 is installed on the one wall opposite to the target 9, and a grid applied with a voltage from a power source 8 is arranged in front of the ion gun 5. In this constitution, to obtain more uniform film thickness of vapor deposition, vacuum chambers are installed side by side, and a dome 10 in the chamber 12 containing an ion gun 12a and a target 12b is moved to a tub 13 containing a heating evaporation source 13a, with a vacuum kept.
COPYRIGHT: (C)1980,JPO&Japio
JP1764879A 1979-02-16 1979-02-16 Apparatus for vacuum evaporation having evaporation source for ion beam sputtering Pending JPS55110028A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1764879A JPS55110028A (en) 1979-02-16 1979-02-16 Apparatus for vacuum evaporation having evaporation source for ion beam sputtering
GB8003934A GB2043003A (en) 1979-02-16 1980-02-06 Track laying vehicle
IT19806/80A IT1148753B (en) 1979-02-16 1980-02-08 LOW NOISE TRACK MECHANISM FOR TRACK TYPE VEHICLES
FR8003408A FR2449021A1 (en) 1979-02-16 1980-02-15 IMPROVED SOUNDPROOFING ASSEMBLY FOR TRACKED VEHICLES

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1764879A JPS55110028A (en) 1979-02-16 1979-02-16 Apparatus for vacuum evaporation having evaporation source for ion beam sputtering

Publications (1)

Publication Number Publication Date
JPS55110028A true JPS55110028A (en) 1980-08-25

Family

ID=11949666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1764879A Pending JPS55110028A (en) 1979-02-16 1979-02-16 Apparatus for vacuum evaporation having evaporation source for ion beam sputtering

Country Status (4)

Country Link
JP (1) JPS55110028A (en)
FR (1) FR2449021A1 (en)
GB (1) GB2043003A (en)
IT (1) IT1148753B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5974279A (en) * 1982-10-21 1984-04-26 Toyota Central Res & Dev Lab Inc Method and device for coating thin metallic film by vapor deposition
CN104294232A (en) * 2014-10-24 2015-01-21 杰莱特（苏州）精密仪器有限公司 Ion sputtering film-plating machine
CN105438298A (en) * 2015-12-19 2016-03-30 北京北方车辆集团有限公司 Carrying wheel shock absorption structure used for tracked vehicle

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4421001A1 (en) * 1994-06-17 1995-12-21 Diehl Remscheid Gmbh & Co Drive system for a track chain

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR845465A (en) * 1938-04-29 1939-08-24 D Auteuil S A Soc Ind Improvements to chains, and more particularly to rolling chains, or tracks
US3887244A (en) * 1973-11-30 1975-06-03 Caterpillar Tractor Co Resilient mid-pitch lug for an endless track
US3897980A (en) * 1974-04-05 1975-08-05 Caterpillar Tractor Co Sprocket tooth engaging track noise suppression means

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5974279A (en) * 1982-10-21 1984-04-26 Toyota Central Res & Dev Lab Inc Method and device for coating thin metallic film by vapor deposition
CN104294232A (en) * 2014-10-24 2015-01-21 杰莱特（苏州）精密仪器有限公司 Ion sputtering film-plating machine
CN105438298A (en) * 2015-12-19 2016-03-30 北京北方车辆集团有限公司 Carrying wheel shock absorption structure used for tracked vehicle

Also Published As

Publication number Publication date
FR2449021A1 (en) 1980-09-12
IT1148753B (en) 1986-12-03
IT8019806A0 (en) 1980-02-08
GB2043003A (en) 1980-10-01

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