JPS5498173A - Liquid phase epitaxial growth device - Google Patents

Liquid phase epitaxial growth device

Info

Publication number
JPS5498173A
JPS5498173A JP492678A JP492678A JPS5498173A JP S5498173 A JPS5498173 A JP S5498173A JP 492678 A JP492678 A JP 492678A JP 492678 A JP492678 A JP 492678A JP S5498173 A JPS5498173 A JP S5498173A
Authority
JP
Japan
Prior art keywords
impurity
solvent
layer
charging plate
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP492678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622453B2 (enrdf_load_stackoverflow
Inventor
Yoichi Osawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP492678A priority Critical patent/JPS5498173A/ja
Publication of JPS5498173A publication Critical patent/JPS5498173A/ja
Publication of JPS622453B2 publication Critical patent/JPS622453B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP492678A 1978-01-19 1978-01-19 Liquid phase epitaxial growth device Granted JPS5498173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP492678A JPS5498173A (en) 1978-01-19 1978-01-19 Liquid phase epitaxial growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP492678A JPS5498173A (en) 1978-01-19 1978-01-19 Liquid phase epitaxial growth device

Publications (2)

Publication Number Publication Date
JPS5498173A true JPS5498173A (en) 1979-08-02
JPS622453B2 JPS622453B2 (enrdf_load_stackoverflow) 1987-01-20

Family

ID=11597197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP492678A Granted JPS5498173A (en) 1978-01-19 1978-01-19 Liquid phase epitaxial growth device

Country Status (1)

Country Link
JP (1) JPS5498173A (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4950866A (enrdf_load_stackoverflow) * 1972-09-18 1974-05-17
JPS50137381A (enrdf_load_stackoverflow) * 1974-04-19 1975-10-31
JPS5159074A (ja) * 1974-11-20 1976-05-22 Tokyo Shibaura Electric Co Ekisoseichosochi
JPS5160688A (ja) * 1974-11-25 1976-05-26 Nippon Telegraph & Telephone Ekisoketsushoseichosochi

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4950866A (enrdf_load_stackoverflow) * 1972-09-18 1974-05-17
JPS50137381A (enrdf_load_stackoverflow) * 1974-04-19 1975-10-31
JPS5159074A (ja) * 1974-11-20 1976-05-22 Tokyo Shibaura Electric Co Ekisoseichosochi
JPS5160688A (ja) * 1974-11-25 1976-05-26 Nippon Telegraph & Telephone Ekisoketsushoseichosochi

Also Published As

Publication number Publication date
JPS622453B2 (enrdf_load_stackoverflow) 1987-01-20

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