JPS5494069A - Photoelectric position detector - Google Patents

Photoelectric position detector

Info

Publication number
JPS5494069A
JPS5494069A JP73278A JP73278A JPS5494069A JP S5494069 A JPS5494069 A JP S5494069A JP 73278 A JP73278 A JP 73278A JP 73278 A JP73278 A JP 73278A JP S5494069 A JPS5494069 A JP S5494069A
Authority
JP
Japan
Prior art keywords
slit
light
slit plate
condensed
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP73278A
Other languages
Japanese (ja)
Other versions
JPS6026166B2 (en
Inventor
Tokuji Shibahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP73278A priority Critical patent/JPS6026166B2/en
Publication of JPS5494069A publication Critical patent/JPS5494069A/en
Publication of JPS6026166B2 publication Critical patent/JPS6026166B2/en
Expired legal-status Critical Current

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  • Optical Transform (AREA)

Abstract

PURPOSE: To impart sufficient detection light quantity to a receiver by forming an optically reflecting surface on an object so that the small displacement is enlarged by the use of the principle of the optical lever and by setting the slit row of the slit plate which is arranged in the optical path to the reflecting surface.
CONSTITUTION: The light of its source 11 goes through a lens 12 into a first slit plate 3, and the light having passed through the slit rows 20 and 23 is reflected on a plane mirror 14 of a diffraction grating 6 so that it goes through a lens 15 to a slit plate 16. This slit plate 16 is formed with three steps of slit rows 31 to 33 so that the line is condensed by lenses 41 to 43 and introduced into light receivers 51 to 53. The lights thus leaked from the plural slits are condensed and detected to obtain a sufficient light quantity so the fine displacement of the object may be detected in high resolution.
COPYRIGHT: (C)1979,JPO&Japio
JP73278A 1978-01-07 1978-01-07 Photoelectric position detection device Expired JPS6026166B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP73278A JPS6026166B2 (en) 1978-01-07 1978-01-07 Photoelectric position detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP73278A JPS6026166B2 (en) 1978-01-07 1978-01-07 Photoelectric position detection device

Publications (2)

Publication Number Publication Date
JPS5494069A true JPS5494069A (en) 1979-07-25
JPS6026166B2 JPS6026166B2 (en) 1985-06-22

Family

ID=11481895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP73278A Expired JPS6026166B2 (en) 1978-01-07 1978-01-07 Photoelectric position detection device

Country Status (1)

Country Link
JP (1) JPS6026166B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251715A (en) * 1985-04-30 1986-11-08 Yokogawa Electric Corp Optical scale reader

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251715A (en) * 1985-04-30 1986-11-08 Yokogawa Electric Corp Optical scale reader

Also Published As

Publication number Publication date
JPS6026166B2 (en) 1985-06-22

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