JPS5494069A - Photoelectric position detector - Google Patents
Photoelectric position detectorInfo
- Publication number
- JPS5494069A JPS5494069A JP73278A JP73278A JPS5494069A JP S5494069 A JPS5494069 A JP S5494069A JP 73278 A JP73278 A JP 73278A JP 73278 A JP73278 A JP 73278A JP S5494069 A JPS5494069 A JP S5494069A
- Authority
- JP
- Japan
- Prior art keywords
- slit
- light
- slit plate
- condensed
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Transform (AREA)
Abstract
PURPOSE: To impart sufficient detection light quantity to a receiver by forming an optically reflecting surface on an object so that the small displacement is enlarged by the use of the principle of the optical lever and by setting the slit row of the slit plate which is arranged in the optical path to the reflecting surface.
CONSTITUTION: The light of its source 11 goes through a lens 12 into a first slit plate 3, and the light having passed through the slit rows 20 and 23 is reflected on a plane mirror 14 of a diffraction grating 6 so that it goes through a lens 15 to a slit plate 16. This slit plate 16 is formed with three steps of slit rows 31 to 33 so that the line is condensed by lenses 41 to 43 and introduced into light receivers 51 to 53. The lights thus leaked from the plural slits are condensed and detected to obtain a sufficient light quantity so the fine displacement of the object may be detected in high resolution.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP73278A JPS6026166B2 (en) | 1978-01-07 | 1978-01-07 | Photoelectric position detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP73278A JPS6026166B2 (en) | 1978-01-07 | 1978-01-07 | Photoelectric position detection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5494069A true JPS5494069A (en) | 1979-07-25 |
JPS6026166B2 JPS6026166B2 (en) | 1985-06-22 |
Family
ID=11481895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP73278A Expired JPS6026166B2 (en) | 1978-01-07 | 1978-01-07 | Photoelectric position detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6026166B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61251715A (en) * | 1985-04-30 | 1986-11-08 | Yokogawa Electric Corp | Optical scale reader |
-
1978
- 1978-01-07 JP JP73278A patent/JPS6026166B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61251715A (en) * | 1985-04-30 | 1986-11-08 | Yokogawa Electric Corp | Optical scale reader |
Also Published As
Publication number | Publication date |
---|---|
JPS6026166B2 (en) | 1985-06-22 |
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