JPS5488068A - Determination method of production condition for semiconductor device - Google Patents
Determination method of production condition for semiconductor deviceInfo
- Publication number
- JPS5488068A JPS5488068A JP15581777A JP15581777A JPS5488068A JP S5488068 A JPS5488068 A JP S5488068A JP 15581777 A JP15581777 A JP 15581777A JP 15581777 A JP15581777 A JP 15581777A JP S5488068 A JPS5488068 A JP S5488068A
- Authority
- JP
- Japan
- Prior art keywords
- test paper
- quartz tube
- boat
- optimum
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To determine the optimum for diffusion in a room temperature by providing test paper or paint, which indicates a pH value, on the surface of a semiconductor wafer which is set in a quartz tube through a boat and supplying carrier gas including alkali to this test paper or paint.
CONSTITUTION: On the surface of silicon wafer 4 stored in boat 3 arranged in quartz tube 1, litmus test paper is sticked or an indicator which changes color sensitively according to pH is applied beforehand. In this constitution, chloric gas in tank 6 is flowed into quartz tube 1 through flow meter 7 and a by-pass tube path consisting of flow meter 9 and a hydrochloric acid storing tank. Thus, test paper provided on the surface of wafer 4 changes color due to hydrochloric acid, and consequently, diffusion parameters such as the flow quantity of carrier gas, shapes of the quartz tube and the boat, and the arrangement of wafers can be obtained. As a result, the optimum for diffusion is determined easily, and the cost required for determination of the optimum is reduced.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15581777A JPS5488068A (en) | 1977-12-24 | 1977-12-24 | Determination method of production condition for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15581777A JPS5488068A (en) | 1977-12-24 | 1977-12-24 | Determination method of production condition for semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5488068A true JPS5488068A (en) | 1979-07-12 |
Family
ID=15614118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15581777A Pending JPS5488068A (en) | 1977-12-24 | 1977-12-24 | Determination method of production condition for semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5488068A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2015025699A1 (en) * | 2013-08-22 | 2017-03-02 | 株式会社サクラクレパス | Indicator used in electronic device manufacturing apparatus, and design and / or management method of the apparatus |
| US10400125B2 (en) | 2014-09-16 | 2019-09-03 | Sakura Color Products Corporation | Ink composition for plasma treatment detection, and plasma treatment detection indicator |
| US10401338B2 (en) | 2014-02-14 | 2019-09-03 | Sakura Color Products Corporation | Plasma processing detection indicator |
-
1977
- 1977-12-24 JP JP15581777A patent/JPS5488068A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2015025699A1 (en) * | 2013-08-22 | 2017-03-02 | 株式会社サクラクレパス | Indicator used in electronic device manufacturing apparatus, and design and / or management method of the apparatus |
| US10401338B2 (en) | 2014-02-14 | 2019-09-03 | Sakura Color Products Corporation | Plasma processing detection indicator |
| US10400125B2 (en) | 2014-09-16 | 2019-09-03 | Sakura Color Products Corporation | Ink composition for plasma treatment detection, and plasma treatment detection indicator |
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