JPS5482981A - Nanufacture of semiconductor device - Google Patents

Nanufacture of semiconductor device

Info

Publication number
JPS5482981A
JPS5482981A JP15081777A JP15081777A JPS5482981A JP S5482981 A JPS5482981 A JP S5482981A JP 15081777 A JP15081777 A JP 15081777A JP 15081777 A JP15081777 A JP 15081777A JP S5482981 A JPS5482981 A JP S5482981A
Authority
JP
Japan
Prior art keywords
film
region
type
heat treatment
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15081777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6115589B2 (enrdf_load_stackoverflow
Inventor
Masahiko Nakamae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15081777A priority Critical patent/JPS5482981A/ja
Publication of JPS5482981A publication Critical patent/JPS5482981A/ja
Publication of JPS6115589B2 publication Critical patent/JPS6115589B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP15081777A 1977-12-14 1977-12-14 Nanufacture of semiconductor device Granted JPS5482981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15081777A JPS5482981A (en) 1977-12-14 1977-12-14 Nanufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15081777A JPS5482981A (en) 1977-12-14 1977-12-14 Nanufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5482981A true JPS5482981A (en) 1979-07-02
JPS6115589B2 JPS6115589B2 (enrdf_load_stackoverflow) 1986-04-24

Family

ID=15505054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15081777A Granted JPS5482981A (en) 1977-12-14 1977-12-14 Nanufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5482981A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224448A (ja) * 1985-03-29 1986-10-06 Toshiba Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224448A (ja) * 1985-03-29 1986-10-06 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6115589B2 (enrdf_load_stackoverflow) 1986-04-24

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