JPS547885A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS547885A
JPS547885A JP7354277A JP7354277A JPS547885A JP S547885 A JPS547885 A JP S547885A JP 7354277 A JP7354277 A JP 7354277A JP 7354277 A JP7354277 A JP 7354277A JP S547885 A JPS547885 A JP S547885A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
atoms
decrease
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7354277A
Other languages
Japanese (ja)
Inventor
Hiroshi Gamo
Tomihisa Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7354277A priority Critical patent/JPS547885A/en
Publication of JPS547885A publication Critical patent/JPS547885A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
    • H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System further characterised by the doping material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
    • H01L29/32—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being within the semiconductor body

Abstract

PURPOSE:To decrease the specific resistivity in the substrate to 3% or less, by diffusing gold to the semiconductor substrate made by neutron radiation by 2 x 10<14> atoms/cm<3>.
JP7354277A 1977-06-20 1977-06-20 Manufacture for semiconductor device Pending JPS547885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7354277A JPS547885A (en) 1977-06-20 1977-06-20 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7354277A JPS547885A (en) 1977-06-20 1977-06-20 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS547885A true JPS547885A (en) 1979-01-20

Family

ID=13521219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7354277A Pending JPS547885A (en) 1977-06-20 1977-06-20 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS547885A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02118200A (en) * 1988-10-25 1990-05-02 Fuji Photo Film Co Ltd Papermaking method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02118200A (en) * 1988-10-25 1990-05-02 Fuji Photo Film Co Ltd Papermaking method

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