JPS547871A - Pattern forming method - Google Patents

Pattern forming method

Info

Publication number
JPS547871A
JPS547871A JP7281177A JP7281177A JPS547871A JP S547871 A JPS547871 A JP S547871A JP 7281177 A JP7281177 A JP 7281177A JP 7281177 A JP7281177 A JP 7281177A JP S547871 A JPS547871 A JP S547871A
Authority
JP
Japan
Prior art keywords
forming method
pattern forming
advance
steps
plasma emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7281177A
Other languages
Japanese (ja)
Inventor
Hiroshi Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7281177A priority Critical patent/JPS547871A/en
Publication of JPS547871A publication Critical patent/JPS547871A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To form etching section gentle in steps, by performing wet etching the surface perforated with plasma emission in advance.
COPYRIGHT: (C)1979,JPO&Japio
JP7281177A 1977-06-21 1977-06-21 Pattern forming method Pending JPS547871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7281177A JPS547871A (en) 1977-06-21 1977-06-21 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7281177A JPS547871A (en) 1977-06-21 1977-06-21 Pattern forming method

Publications (1)

Publication Number Publication Date
JPS547871A true JPS547871A (en) 1979-01-20

Family

ID=13500151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7281177A Pending JPS547871A (en) 1977-06-21 1977-06-21 Pattern forming method

Country Status (1)

Country Link
JP (1) JPS547871A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4645562A (en) * 1985-04-29 1987-02-24 Hughes Aircraft Company Double layer photoresist technique for side-wall profile control in plasma etching processes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4645562A (en) * 1985-04-29 1987-02-24 Hughes Aircraft Company Double layer photoresist technique for side-wall profile control in plasma etching processes

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