JPS53101278A - Etching process method - Google Patents

Etching process method

Info

Publication number
JPS53101278A
JPS53101278A JP1498377A JP1498377A JPS53101278A JP S53101278 A JPS53101278 A JP S53101278A JP 1498377 A JP1498377 A JP 1498377A JP 1498377 A JP1498377 A JP 1498377A JP S53101278 A JPS53101278 A JP S53101278A
Authority
JP
Japan
Prior art keywords
etching process
process method
etching
solution
secure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1498377A
Other languages
Japanese (ja)
Inventor
Kimio Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1498377A priority Critical patent/JPS53101278A/en
Publication of JPS53101278A publication Critical patent/JPS53101278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To secure a uniform process by carrying out the etching while rotating the object to the processed in the etching solution which controls the solution temperature.
COPYRIGHT: (C)1978,JPO&Japio
JP1498377A 1977-02-16 1977-02-16 Etching process method Pending JPS53101278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1498377A JPS53101278A (en) 1977-02-16 1977-02-16 Etching process method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1498377A JPS53101278A (en) 1977-02-16 1977-02-16 Etching process method

Publications (1)

Publication Number Publication Date
JPS53101278A true JPS53101278A (en) 1978-09-04

Family

ID=11876188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1498377A Pending JPS53101278A (en) 1977-02-16 1977-02-16 Etching process method

Country Status (1)

Country Link
JP (1) JPS53101278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568633A (en) * 1978-11-20 1980-05-23 Fujitsu Ltd Method and device for back etching of semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568633A (en) * 1978-11-20 1980-05-23 Fujitsu Ltd Method and device for back etching of semiconductor substrate

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