JPS53101278A - Etching process method - Google Patents
Etching process methodInfo
- Publication number
- JPS53101278A JPS53101278A JP1498377A JP1498377A JPS53101278A JP S53101278 A JPS53101278 A JP S53101278A JP 1498377 A JP1498377 A JP 1498377A JP 1498377 A JP1498377 A JP 1498377A JP S53101278 A JPS53101278 A JP S53101278A
- Authority
- JP
- Japan
- Prior art keywords
- etching process
- process method
- etching
- solution
- secure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To secure a uniform process by carrying out the etching while rotating the object to the processed in the etching solution which controls the solution temperature.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1498377A JPS53101278A (en) | 1977-02-16 | 1977-02-16 | Etching process method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1498377A JPS53101278A (en) | 1977-02-16 | 1977-02-16 | Etching process method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53101278A true JPS53101278A (en) | 1978-09-04 |
Family
ID=11876188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1498377A Pending JPS53101278A (en) | 1977-02-16 | 1977-02-16 | Etching process method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53101278A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5568633A (en) * | 1978-11-20 | 1980-05-23 | Fujitsu Ltd | Method and device for back etching of semiconductor substrate |
-
1977
- 1977-02-16 JP JP1498377A patent/JPS53101278A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5568633A (en) * | 1978-11-20 | 1980-05-23 | Fujitsu Ltd | Method and device for back etching of semiconductor substrate |
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