JPS5385171A - Selective etching method - Google Patents
Selective etching methodInfo
- Publication number
- JPS5385171A JPS5385171A JP66577A JP66577A JPS5385171A JP S5385171 A JPS5385171 A JP S5385171A JP 66577 A JP66577 A JP 66577A JP 66577 A JP66577 A JP 66577A JP S5385171 A JPS5385171 A JP S5385171A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- selective etching
- selectively etched
- portions
- etched material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To remove the variations in size and make possible fine working by ionimplanting a material differing from the selectively etched material in the required portions of the surface of the selectively etched material and etching the portions having caused composition change.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP66577A JPS5385171A (en) | 1977-01-06 | 1977-01-06 | Selective etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP66577A JPS5385171A (en) | 1977-01-06 | 1977-01-06 | Selective etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5385171A true JPS5385171A (en) | 1978-07-27 |
Family
ID=11480020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP66577A Pending JPS5385171A (en) | 1977-01-06 | 1977-01-06 | Selective etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5385171A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5762051A (en) * | 1980-09-30 | 1982-04-14 | Nec Corp | Manufacture of mask for x-ray exposure |
-
1977
- 1977-01-06 JP JP66577A patent/JPS5385171A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5762051A (en) * | 1980-09-30 | 1982-04-14 | Nec Corp | Manufacture of mask for x-ray exposure |
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