JPS5385171A - Selective etching method - Google Patents

Selective etching method

Info

Publication number
JPS5385171A
JPS5385171A JP66577A JP66577A JPS5385171A JP S5385171 A JPS5385171 A JP S5385171A JP 66577 A JP66577 A JP 66577A JP 66577 A JP66577 A JP 66577A JP S5385171 A JPS5385171 A JP S5385171A
Authority
JP
Japan
Prior art keywords
etching method
selective etching
selectively etched
portions
etched material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP66577A
Other languages
Japanese (ja)
Inventor
Takayuki Matsukawa
Satoru Kawazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP66577A priority Critical patent/JPS5385171A/en
Publication of JPS5385171A publication Critical patent/JPS5385171A/en
Pending legal-status Critical Current

Links

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  • Weting (AREA)

Abstract

PURPOSE: To remove the variations in size and make possible fine working by ionimplanting a material differing from the selectively etched material in the required portions of the surface of the selectively etched material and etching the portions having caused composition change.
COPYRIGHT: (C)1978,JPO&Japio
JP66577A 1977-01-06 1977-01-06 Selective etching method Pending JPS5385171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP66577A JPS5385171A (en) 1977-01-06 1977-01-06 Selective etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP66577A JPS5385171A (en) 1977-01-06 1977-01-06 Selective etching method

Publications (1)

Publication Number Publication Date
JPS5385171A true JPS5385171A (en) 1978-07-27

Family

ID=11480020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP66577A Pending JPS5385171A (en) 1977-01-06 1977-01-06 Selective etching method

Country Status (1)

Country Link
JP (1) JPS5385171A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762051A (en) * 1980-09-30 1982-04-14 Nec Corp Manufacture of mask for x-ray exposure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762051A (en) * 1980-09-30 1982-04-14 Nec Corp Manufacture of mask for x-ray exposure

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