JPS5478681A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5478681A JPS5478681A JP14627277A JP14627277A JPS5478681A JP S5478681 A JPS5478681 A JP S5478681A JP 14627277 A JP14627277 A JP 14627277A JP 14627277 A JP14627277 A JP 14627277A JP S5478681 A JPS5478681 A JP S5478681A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- films
- wirings
- film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 229910021332 silicide Inorganic materials 0.000 abstract 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14627277A JPS5478681A (en) | 1977-12-05 | 1977-12-05 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14627277A JPS5478681A (en) | 1977-12-05 | 1977-12-05 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5478681A true JPS5478681A (en) | 1979-06-22 |
| JPS6131616B2 JPS6131616B2 (enrdf_load_stackoverflow) | 1986-07-21 |
Family
ID=15403976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14627277A Granted JPS5478681A (en) | 1977-12-05 | 1977-12-05 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5478681A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5575242A (en) * | 1978-12-04 | 1980-06-06 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Method of forming through-hole |
| JPS57183057A (en) * | 1981-05-06 | 1982-11-11 | Nec Corp | Semiconductor device and manufacture thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5222481A (en) * | 1975-08-14 | 1977-02-19 | Oki Electric Ind Co Ltd | Method of manufacturing semiconductor device |
| JPS5295986A (en) * | 1976-02-09 | 1977-08-12 | Hitachi Ltd | Corrosion resisting wiring of electronic parts and manufacture |
-
1977
- 1977-12-05 JP JP14627277A patent/JPS5478681A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5222481A (en) * | 1975-08-14 | 1977-02-19 | Oki Electric Ind Co Ltd | Method of manufacturing semiconductor device |
| JPS5295986A (en) * | 1976-02-09 | 1977-08-12 | Hitachi Ltd | Corrosion resisting wiring of electronic parts and manufacture |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5575242A (en) * | 1978-12-04 | 1980-06-06 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Method of forming through-hole |
| JPS57183057A (en) * | 1981-05-06 | 1982-11-11 | Nec Corp | Semiconductor device and manufacture thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6131616B2 (enrdf_load_stackoverflow) | 1986-07-21 |
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