JPS5478080A - Production of semiconductor element - Google Patents

Production of semiconductor element

Info

Publication number
JPS5478080A
JPS5478080A JP14509077A JP14509077A JPS5478080A JP S5478080 A JPS5478080 A JP S5478080A JP 14509077 A JP14509077 A JP 14509077A JP 14509077 A JP14509077 A JP 14509077A JP S5478080 A JPS5478080 A JP S5478080A
Authority
JP
Japan
Prior art keywords
wafer
sheet
elements
adhesive
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14509077A
Other languages
English (en)
Inventor
Katsumi Shibasawa
Akira Kuromaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14509077A priority Critical patent/JPS5478080A/ja
Publication of JPS5478080A publication Critical patent/JPS5478080A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP14509077A 1977-12-05 1977-12-05 Production of semiconductor element Pending JPS5478080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14509077A JPS5478080A (en) 1977-12-05 1977-12-05 Production of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14509077A JPS5478080A (en) 1977-12-05 1977-12-05 Production of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5478080A true JPS5478080A (en) 1979-06-21

Family

ID=15377140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14509077A Pending JPS5478080A (en) 1977-12-05 1977-12-05 Production of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5478080A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178333U (ja) * 1987-05-09 1988-11-18
CN106816412A (zh) * 2017-01-19 2017-06-09 吉林麦吉柯半导体有限公司 晶圆的切割工艺及晶圆的生产方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178333U (ja) * 1987-05-09 1988-11-18
CN106816412A (zh) * 2017-01-19 2017-06-09 吉林麦吉柯半导体有限公司 晶圆的切割工艺及晶圆的生产方法

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