JPS5476135A - Electron beam resist - Google Patents

Electron beam resist

Info

Publication number
JPS5476135A
JPS5476135A JP13592378A JP13592378A JPS5476135A JP S5476135 A JPS5476135 A JP S5476135A JP 13592378 A JP13592378 A JP 13592378A JP 13592378 A JP13592378 A JP 13592378A JP S5476135 A JPS5476135 A JP S5476135A
Authority
JP
Japan
Prior art keywords
electron beam
beam resist
resist
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13592378A
Other languages
English (en)
Inventor
Kararu Yarosurafu
Bendaru Bofumiru
Zahobuaru Yaromiru
Peetoru Jiri
Perutsubaueru Zudeneku
Subuetsuku Furanteiseeku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Czech Academy of Sciences CAS
Original Assignee
Czech Academy of Sciences CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Czech Academy of Sciences CAS filed Critical Czech Academy of Sciences CAS
Publication of JPS5476135A publication Critical patent/JPS5476135A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP13592378A 1977-11-07 1978-11-06 Electron beam resist Pending JPS5476135A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS777258A CS193322B1 (en) 1977-11-07 1977-11-07 Electron resisit

Publications (1)

Publication Number Publication Date
JPS5476135A true JPS5476135A (en) 1979-06-18

Family

ID=5421395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13592378A Pending JPS5476135A (en) 1977-11-07 1978-11-06 Electron beam resist

Country Status (8)

Country Link
US (1) US4269962A (ja)
JP (1) JPS5476135A (ja)
BE (1) BE871801A (ja)
CS (1) CS193322B1 (ja)
DE (1) DE2848254A1 (ja)
FR (1) FR2422984A1 (ja)
GB (1) GB2009759A (ja)
NL (1) NL7810885A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614232A (en) * 1979-07-16 1981-02-12 Mitsubishi Rayon Co Ltd Negative type resist resin
CA2377081A1 (en) 2002-03-15 2003-09-15 Quantiscript Inc. Method of producing an etch-resistant polymer structure using electron beam lithography

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480441A (en) * 1966-08-09 1969-11-25 Ibm Photosensitive compositions
US3885060A (en) * 1968-08-23 1975-05-20 Hitachi Ltd Production of insolubilized organic polymers
US3840449A (en) * 1968-12-13 1974-10-08 Bridgestone Tire Co Ltd Novel method of producing two-component and multi-component copolymers containing conjugated diene compounds and conjugated polar vinyl monomers using photo polymerization
US3615469A (en) * 1969-06-02 1971-10-26 Goodrich Co B F Polymeric printing plates
BE794343A (fr) * 1972-01-21 1973-07-19 Westinghouse Electric Corp Methode de protection d'une partie d'un substrat soumis a l'action d'1n faisceau electronique
US3787212A (en) * 1972-08-04 1974-01-22 Monsanto Co Polymeric photosensitive compositions and methods using same
GB1448838A (en) * 1972-11-14 1976-09-08 Kansai Paint Co Ltd Lithography
US3865597A (en) * 1973-03-26 1975-02-11 Western Electric Co Additives to negative photoresists which increase the sensitivity thereof
US4061799A (en) * 1973-11-05 1977-12-06 Texas Instruments Incorporated Method of patterning styrene diene block copolymer electron beam resists
US3931435A (en) * 1974-12-20 1976-01-06 International Business Machines Corporation Electron beam positive resists containing acetate polymers
JPS51116893A (en) * 1975-04-08 1976-10-14 Ube Ind Ltd Photo-setting compositions
US4130424A (en) * 1976-08-06 1978-12-19 Bell Telephone Laboratories, Incorporated Process using radiation curable epoxy containing resist and resultant product

Also Published As

Publication number Publication date
DE2848254A1 (de) 1979-05-10
US4269962A (en) 1981-05-26
FR2422984A1 (fr) 1979-11-09
CS193322B1 (en) 1979-10-31
BE871801A (fr) 1979-03-01
NL7810885A (nl) 1979-05-09
GB2009759A (en) 1979-06-20

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