JPS5458366A - Electron beam unit - Google Patents

Electron beam unit

Info

Publication number
JPS5458366A
JPS5458366A JP12528177A JP12528177A JPS5458366A JP S5458366 A JPS5458366 A JP S5458366A JP 12528177 A JP12528177 A JP 12528177A JP 12528177 A JP12528177 A JP 12528177A JP S5458366 A JPS5458366 A JP S5458366A
Authority
JP
Japan
Prior art keywords
electron beam
beam unit
unit
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12528177A
Other languages
Japanese (ja)
Inventor
Katsuhiro Kawabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP12528177A priority Critical patent/JPS5458366A/en
Publication of JPS5458366A publication Critical patent/JPS5458366A/en
Pending legal-status Critical Current

Links

JP12528177A 1977-10-19 1977-10-19 Electron beam unit Pending JPS5458366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12528177A JPS5458366A (en) 1977-10-19 1977-10-19 Electron beam unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12528177A JPS5458366A (en) 1977-10-19 1977-10-19 Electron beam unit

Publications (1)

Publication Number Publication Date
JPS5458366A true JPS5458366A (en) 1979-05-11

Family

ID=14906182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12528177A Pending JPS5458366A (en) 1977-10-19 1977-10-19 Electron beam unit

Country Status (1)

Country Link
JP (1) JPS5458366A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132422A (en) * 1984-07-24 1986-02-15 Hitachi Ltd Electron beam lithography equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132422A (en) * 1984-07-24 1986-02-15 Hitachi Ltd Electron beam lithography equipment

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