JPS5474376A - Position detection system for semiconductor chip - Google Patents
Position detection system for semiconductor chipInfo
- Publication number
- JPS5474376A JPS5474376A JP14110077A JP14110077A JPS5474376A JP S5474376 A JPS5474376 A JP S5474376A JP 14110077 A JP14110077 A JP 14110077A JP 14110077 A JP14110077 A JP 14110077A JP S5474376 A JPS5474376 A JP S5474376A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- subject
- level
- threshold
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000001514 detection method Methods 0.000 title 1
- 238000000605 extraction Methods 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14110077A JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14110077A JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27242285A Division JPS61286706A (ja) | 1985-12-05 | 1985-12-05 | 位置検出方式 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5474376A true JPS5474376A (en) | 1979-06-14 |
| JPS62576B2 JPS62576B2 (enrdf_load_stackoverflow) | 1987-01-08 |
Family
ID=15284180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14110077A Granted JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5474376A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56153747A (en) * | 1980-04-02 | 1981-11-27 | Gen Signal Corp | Positioning system |
| JPS58125837A (ja) * | 1982-01-22 | 1983-07-27 | Mitsubishi Electric Corp | 自動ダイボンダのペレツト位置決め装置 |
| JPS61286706A (ja) * | 1985-12-05 | 1986-12-17 | Toshiba Corp | 位置検出方式 |
-
1977
- 1977-11-26 JP JP14110077A patent/JPS5474376A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56153747A (en) * | 1980-04-02 | 1981-11-27 | Gen Signal Corp | Positioning system |
| JPS58125837A (ja) * | 1982-01-22 | 1983-07-27 | Mitsubishi Electric Corp | 自動ダイボンダのペレツト位置決め装置 |
| JPS61286706A (ja) * | 1985-12-05 | 1986-12-17 | Toshiba Corp | 位置検出方式 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62576B2 (enrdf_load_stackoverflow) | 1987-01-08 |
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