JPS5472952A - Electron beam equipment - Google Patents

Electron beam equipment

Info

Publication number
JPS5472952A
JPS5472952A JP14036777A JP14036777A JPS5472952A JP S5472952 A JPS5472952 A JP S5472952A JP 14036777 A JP14036777 A JP 14036777A JP 14036777 A JP14036777 A JP 14036777A JP S5472952 A JPS5472952 A JP S5472952A
Authority
JP
Japan
Prior art keywords
chamber
preliminary chamber
main exhaust
preliminary
exhaust system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14036777A
Other languages
Japanese (ja)
Inventor
Nagamitsu Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14036777A priority Critical patent/JPS5472952A/en
Publication of JPS5472952A publication Critical patent/JPS5472952A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To simplify an exhaust system, by evacuating a preliminary chamber to a high vacuum making use of a main exhaust pump inside a mirror body such as a sample chamber.
CONSTITUTION: This equipment is provided with the main exhaust system which evacuates mirror body 1 such as electron-gun chamber 2 and sample chamber 4 by exhaust pump 6, preliminary chamber 9 linking to sample chamber 4 via air lock valve 10, and exhaust methods 11 and 12 which evacuate preliminary chamber 9 roughly. Then, it is made possible to connect preliminary chamber 9 to main exhaust pipe 5 of the main exhaust system and cooling trap 8 is arranged near the connection part. Consequently, preliminary chamber 9 is evacuated to a high vacuum.
COPYRIGHT: (C)1979,JPO&Japio
JP14036777A 1977-11-22 1977-11-22 Electron beam equipment Pending JPS5472952A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14036777A JPS5472952A (en) 1977-11-22 1977-11-22 Electron beam equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14036777A JPS5472952A (en) 1977-11-22 1977-11-22 Electron beam equipment

Publications (1)

Publication Number Publication Date
JPS5472952A true JPS5472952A (en) 1979-06-11

Family

ID=15267166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14036777A Pending JPS5472952A (en) 1977-11-22 1977-11-22 Electron beam equipment

Country Status (1)

Country Link
JP (1) JPS5472952A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4431075Y1 (en) * 1967-03-25 1969-12-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4431075Y1 (en) * 1967-03-25 1969-12-22

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