JPS5472076A - Method and apparatus for pattern inspection - Google Patents

Method and apparatus for pattern inspection

Info

Publication number
JPS5472076A
JPS5472076A JP13843277A JP13843277A JPS5472076A JP S5472076 A JPS5472076 A JP S5472076A JP 13843277 A JP13843277 A JP 13843277A JP 13843277 A JP13843277 A JP 13843277A JP S5472076 A JPS5472076 A JP S5472076A
Authority
JP
Japan
Prior art keywords
pattern
inspected
standard
standard pattern
similarity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13843277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342201B2 (OSRAM
Inventor
Michiaki Miyagawa
Masao Nito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13843277A priority Critical patent/JPS5472076A/ja
Publication of JPS5472076A publication Critical patent/JPS5472076A/ja
Publication of JPS6342201B2 publication Critical patent/JPS6342201B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP13843277A 1977-11-19 1977-11-19 Method and apparatus for pattern inspection Granted JPS5472076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13843277A JPS5472076A (en) 1977-11-19 1977-11-19 Method and apparatus for pattern inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13843277A JPS5472076A (en) 1977-11-19 1977-11-19 Method and apparatus for pattern inspection

Publications (2)

Publication Number Publication Date
JPS5472076A true JPS5472076A (en) 1979-06-09
JPS6342201B2 JPS6342201B2 (OSRAM) 1988-08-22

Family

ID=15221827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13843277A Granted JPS5472076A (en) 1977-11-19 1977-11-19 Method and apparatus for pattern inspection

Country Status (1)

Country Link
JP (1) JPS5472076A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073310A (ja) * 1983-09-30 1985-04-25 Fujitsu Ltd パタ−ン検査装置
JPS62242807A (ja) * 1986-04-15 1987-10-23 Toshiba Corp 寸法測定装置
JP2011196728A (ja) * 2010-03-17 2011-10-06 Nuflare Technology Inc 検査装置および検査方法
JP2011221264A (ja) * 2010-04-09 2011-11-04 Nuflare Technology Inc 検査方法および検査装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073310A (ja) * 1983-09-30 1985-04-25 Fujitsu Ltd パタ−ン検査装置
JPS62242807A (ja) * 1986-04-15 1987-10-23 Toshiba Corp 寸法測定装置
JP2011196728A (ja) * 2010-03-17 2011-10-06 Nuflare Technology Inc 検査装置および検査方法
JP2011221264A (ja) * 2010-04-09 2011-11-04 Nuflare Technology Inc 検査方法および検査装置
US9036896B2 (en) 2010-04-09 2015-05-19 Nuflare Technology, Inc. Inspection system and method for inspecting line width and/or positional errors of a pattern
US9406117B2 (en) 2010-04-09 2016-08-02 Nuflare Technology, Inc. Inspection system and method for inspecting line width and/or positional errors of a pattern

Also Published As

Publication number Publication date
JPS6342201B2 (OSRAM) 1988-08-22

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