JPS5278467A - Method of determining reference points for measurement of configuratio n - Google Patents
Method of determining reference points for measurement of configuratio nInfo
- Publication number
- JPS5278467A JPS5278467A JP15399875A JP15399875A JPS5278467A JP S5278467 A JPS5278467 A JP S5278467A JP 15399875 A JP15399875 A JP 15399875A JP 15399875 A JP15399875 A JP 15399875A JP S5278467 A JPS5278467 A JP S5278467A
- Authority
- JP
- Japan
- Prior art keywords
- reference points
- measurement
- configuratio
- determining reference
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To provide a method of determining reference points for measurement of configuration, in which optical coordinates pattern is projected on an object to be measured, and geometrically characteristic points, lying on border line of bright regions and dark regions of image obtained by viewing the pattern from two different directions, are selected and determined as reference points, whereby reference points can be defined distinctly.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15399875A JPS5278467A (en) | 1975-12-25 | 1975-12-25 | Method of determining reference points for measurement of configuratio n |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15399875A JPS5278467A (en) | 1975-12-25 | 1975-12-25 | Method of determining reference points for measurement of configuratio n |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5278467A true JPS5278467A (en) | 1977-07-01 |
Family
ID=15574669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15399875A Pending JPS5278467A (en) | 1975-12-25 | 1975-12-25 | Method of determining reference points for measurement of configuratio n |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5278467A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57204141A (en) * | 1981-06-10 | 1982-12-14 | Ibm | Method of inspecting deflection of semiconductor substrate |
JPS606812A (en) * | 1983-06-24 | 1985-01-14 | Hisaya:Kk | Restoring method of object and forming method of development diagram |
JPS622105A (en) * | 1985-06-28 | 1987-01-08 | Hitachi Ltd | Shape recognizing method |
JPH03158709A (en) * | 1989-11-15 | 1991-07-08 | Ezel Inc | Recognizing device for solid body shape |
JP2005227194A (en) * | 2004-02-16 | 2005-08-25 | Casio Comput Co Ltd | Projector, angle detecting method, and program |
KR20180085046A (en) | 2016-01-22 | 2018-07-25 | 아사히 가세이 가부시키가이샤 | Non-aqueous lithium-ion battery device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50134463A (en) * | 1974-04-10 | 1975-10-24 |
-
1975
- 1975-12-25 JP JP15399875A patent/JPS5278467A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50134463A (en) * | 1974-04-10 | 1975-10-24 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57204141A (en) * | 1981-06-10 | 1982-12-14 | Ibm | Method of inspecting deflection of semiconductor substrate |
JPS606812A (en) * | 1983-06-24 | 1985-01-14 | Hisaya:Kk | Restoring method of object and forming method of development diagram |
JPH047445B2 (en) * | 1983-06-24 | 1992-02-12 | Hisaya Kk | |
JPS622105A (en) * | 1985-06-28 | 1987-01-08 | Hitachi Ltd | Shape recognizing method |
JPH03158709A (en) * | 1989-11-15 | 1991-07-08 | Ezel Inc | Recognizing device for solid body shape |
JP2005227194A (en) * | 2004-02-16 | 2005-08-25 | Casio Comput Co Ltd | Projector, angle detecting method, and program |
KR20180085046A (en) | 2016-01-22 | 2018-07-25 | 아사히 가세이 가부시키가이샤 | Non-aqueous lithium-ion battery device |
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