JPS5464481A - Manufacture for semiconductor - Google Patents

Manufacture for semiconductor

Info

Publication number
JPS5464481A
JPS5464481A JP13112677A JP13112677A JPS5464481A JP S5464481 A JPS5464481 A JP S5464481A JP 13112677 A JP13112677 A JP 13112677A JP 13112677 A JP13112677 A JP 13112677A JP S5464481 A JPS5464481 A JP S5464481A
Authority
JP
Japan
Prior art keywords
layer
electrode
wafer
heat sink
type gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13112677A
Other languages
English (en)
Inventor
Hironobu Hatakeyama
Takeshi Suzuki
Takashi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13112677A priority Critical patent/JPS5464481A/ja
Publication of JPS5464481A publication Critical patent/JPS5464481A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP13112677A 1977-10-31 1977-10-31 Manufacture for semiconductor Pending JPS5464481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13112677A JPS5464481A (en) 1977-10-31 1977-10-31 Manufacture for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13112677A JPS5464481A (en) 1977-10-31 1977-10-31 Manufacture for semiconductor

Publications (1)

Publication Number Publication Date
JPS5464481A true JPS5464481A (en) 1979-05-24

Family

ID=15050583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13112677A Pending JPS5464481A (en) 1977-10-31 1977-10-31 Manufacture for semiconductor

Country Status (1)

Country Link
JP (1) JPS5464481A (ja)

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