JPS54590A - Element isolating method - Google Patents
Element isolating methodInfo
- Publication number
- JPS54590A JPS54590A JP6482377A JP6482377A JPS54590A JP S54590 A JPS54590 A JP S54590A JP 6482377 A JP6482377 A JP 6482377A JP 6482377 A JP6482377 A JP 6482377A JP S54590 A JPS54590 A JP S54590A
- Authority
- JP
- Japan
- Prior art keywords
- element isolating
- recesses
- nucleus
- isolating method
- bird
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To obtain isolation of isoplanar structure free from bird heads and bird beaks by covering the entire surface formed with recesses in element isolating regions with an insulating film, forming a growth nucleus in the bottom of each recess and burying the recesses by causing selective growth with this as a nucleus.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6482377A JPS54590A (en) | 1977-06-03 | 1977-06-03 | Element isolating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6482377A JPS54590A (en) | 1977-06-03 | 1977-06-03 | Element isolating method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54590A true JPS54590A (en) | 1979-01-05 |
Family
ID=13269348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6482377A Pending JPS54590A (en) | 1977-06-03 | 1977-06-03 | Element isolating method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54590A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55138251A (en) * | 1979-04-11 | 1980-10-28 | Hitachi Ltd | Method for dielectric isolation of semiconductor element |
JPS598351A (en) * | 1982-06-30 | 1984-01-17 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Method of forming insulating region on semiconductor substrate |
JPS5958838A (en) * | 1982-09-29 | 1984-04-04 | Hitachi Ltd | Semiconductor device |
JPS59119849A (en) * | 1982-12-27 | 1984-07-11 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59188141A (en) * | 1984-03-26 | 1984-10-25 | Hitachi Ltd | Semiconductor integrated circuit |
JPS6090473A (en) * | 1983-10-24 | 1985-05-21 | Matsushita Electronics Corp | Solid-state image pickup device |
-
1977
- 1977-06-03 JP JP6482377A patent/JPS54590A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55138251A (en) * | 1979-04-11 | 1980-10-28 | Hitachi Ltd | Method for dielectric isolation of semiconductor element |
JPS598351A (en) * | 1982-06-30 | 1984-01-17 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Method of forming insulating region on semiconductor substrate |
JPS5958838A (en) * | 1982-09-29 | 1984-04-04 | Hitachi Ltd | Semiconductor device |
JPS59119849A (en) * | 1982-12-27 | 1984-07-11 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6090473A (en) * | 1983-10-24 | 1985-05-21 | Matsushita Electronics Corp | Solid-state image pickup device |
JPS59188141A (en) * | 1984-03-26 | 1984-10-25 | Hitachi Ltd | Semiconductor integrated circuit |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5351970A (en) | Manufacture for semiconductor substrate | |
JPS5226182A (en) | Manufacturing method of semi-conductor unit | |
JPS54590A (en) | Element isolating method | |
EP0035118A3 (en) | Iii - v group compound semiconductor light-emitting element and method of producing the same | |
JPS54159171A (en) | Method of forming epitaxial silicon layer | |
JPS5434756A (en) | Vapor-phase growth method for semiconductor | |
JPS52143761A (en) | Crystal growth method | |
JPS5381392A (en) | Method and apparatus for separating earthworms from soil excrement | |
JPS5336183A (en) | Method of forming epitaxial layer | |
JPS5329086A (en) | Production of semiconductor device | |
GB2019644B (en) | Producing epitaxial layers | |
JPS5258335A (en) | Program extending method by rom cassette system | |
JPS5357979A (en) | Semiconductor device and its production | |
JPS5388584A (en) | Production of sio2 layer for interelement isolation | |
JPS52144646A (en) | Alpha-hydroxyaldehydemercaptal-s-oxides and their preparation | |
JPS51134082A (en) | Method to manufacture the semiconductor unit | |
JPS5312111A (en) | Water maintaining improvement method of shirasu soil | |
JPS5326691A (en) | Multi-layer wiring struc ture | |
JPS5432991A (en) | Manufacture of semiconductor | |
JPS5244193A (en) | Epitaxial growth method | |
JPS54140756A (en) | Soybean milk producing method | |
JPS53103381A (en) | Compound semiconductor element | |
JPS52154707A (en) | Rearing method for matty seedling | |
JPS52150213A (en) | Rearing method for matty seedling | |
JPS53114006A (en) | Manufacturing method of coreless armature |