JPS5457868A - Wafer scanner - Google Patents
Wafer scannerInfo
- Publication number
- JPS5457868A JPS5457868A JP12347277A JP12347277A JPS5457868A JP S5457868 A JPS5457868 A JP S5457868A JP 12347277 A JP12347277 A JP 12347277A JP 12347277 A JP12347277 A JP 12347277A JP S5457868 A JPS5457868 A JP S5457868A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating cylinder
- ion beam
- angle
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make the implantation amount uniform regardless of the size of a rotating cylinder by enabling a wafer to turn on the axis of a rotating cylinder tracing its external circumference and by changing an angle contained by the wafer and an ion beam sequentially.
CONSTITUTION: Wafer 5 is fixed onto the external circumference of rotating cylinder 7 by rotatable wafer holder 6. Further, wafer holder 6 is fixed to arm 8, which is made in contact invariably with the inside surface of cam 9 fixed inside the vacuum tank of the implantation chamber. In accordance with the rotation of rotating cylinder 7, only range (γ) which ion beam 10 strikes wafer 5 is varied by α= β/31/2 (α is an angle of wafer 5 against the direction perpendicular to ion beam 10, and β is a rotation angle of the rotating cylinder) and the direction of wafer 5 is finely changed to the axial direction of the rotating cylinder
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12347277A JPS5457868A (en) | 1977-10-17 | 1977-10-17 | Wafer scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12347277A JPS5457868A (en) | 1977-10-17 | 1977-10-17 | Wafer scanner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5457868A true JPS5457868A (en) | 1979-05-10 |
Family
ID=14861463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12347277A Pending JPS5457868A (en) | 1977-10-17 | 1977-10-17 | Wafer scanner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5457868A (en) |
-
1977
- 1977-10-17 JP JP12347277A patent/JPS5457868A/en active Pending
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