JPS55154434A - Vapor coating apparatus for frozen sample - Google Patents

Vapor coating apparatus for frozen sample

Info

Publication number
JPS55154434A
JPS55154434A JP6243079A JP6243079A JPS55154434A JP S55154434 A JPS55154434 A JP S55154434A JP 6243079 A JP6243079 A JP 6243079A JP 6243079 A JP6243079 A JP 6243079A JP S55154434 A JPS55154434 A JP S55154434A
Authority
JP
Japan
Prior art keywords
sample
axis
stage
sample holder
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6243079A
Other languages
Japanese (ja)
Inventor
Shoji Okutomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI GIJUTSU SERVICE KK
Original Assignee
NICHIDENSHI GIJUTSU SERVICE KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI GIJUTSU SERVICE KK filed Critical NICHIDENSHI GIJUTSU SERVICE KK
Priority to JP6243079A priority Critical patent/JPS55154434A/en
Publication of JPS55154434A publication Critical patent/JPS55154434A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the work of evaporating of carbon, etc. in the state that the sample is held frozen by mounting a sample holder to a sample rotating stage tiltably with the direction orthogonal to the revolving axis of the rotating sample stage as the axis of inclination.
CONSTITUTION: A cooling tank 6 is provided in a sample chamber 2 and a sample rotating stage 8 is mounted to the central part thereof rotatably about the axis Z by a motor 9. A sample holder chamber 11 of circular cylindrical form is notched in the upper part of the sample stage 8 in the X-axis direction orthogonal to the revolving axis Z of the stage 8. A sample holder 12 is fitted therein in such a manner as to be able to rotate (tilt) around the axis X. The sample holder 12 is of the shape comprising by notching the central part of a circular cylinder and the sample 13 to be vapor-coated is loaded in the recess of the notched part. Vapor coating by an evaporating source 4 is accomplished through the upper opening 14 of the stage 8. To tilt the sample surface with respect to the X axis, the operating lever 18 for tilting is moved in the X' direction.
COPYRIGHT: (C)1980,JPO&Japio
JP6243079A 1979-05-21 1979-05-21 Vapor coating apparatus for frozen sample Pending JPS55154434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6243079A JPS55154434A (en) 1979-05-21 1979-05-21 Vapor coating apparatus for frozen sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6243079A JPS55154434A (en) 1979-05-21 1979-05-21 Vapor coating apparatus for frozen sample

Publications (1)

Publication Number Publication Date
JPS55154434A true JPS55154434A (en) 1980-12-02

Family

ID=13199941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6243079A Pending JPS55154434A (en) 1979-05-21 1979-05-21 Vapor coating apparatus for frozen sample

Country Status (1)

Country Link
JP (1) JPS55154434A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57150553U (en) * 1981-03-16 1982-09-21

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494563B1 (en) * 1962-05-07 1974-02-01
JPS5451370A (en) * 1977-09-30 1979-04-23 Hitachi Ltd Carrier for producing frozen sample of charged-particle beam device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494563B1 (en) * 1962-05-07 1974-02-01
JPS5451370A (en) * 1977-09-30 1979-04-23 Hitachi Ltd Carrier for producing frozen sample of charged-particle beam device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57150553U (en) * 1981-03-16 1982-09-21

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