JPS55154434A - Vapor coating apparatus for frozen sample - Google Patents
Vapor coating apparatus for frozen sampleInfo
- Publication number
- JPS55154434A JPS55154434A JP6243079A JP6243079A JPS55154434A JP S55154434 A JPS55154434 A JP S55154434A JP 6243079 A JP6243079 A JP 6243079A JP 6243079 A JP6243079 A JP 6243079A JP S55154434 A JPS55154434 A JP S55154434A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- axis
- stage
- sample holder
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable the work of evaporating of carbon, etc. in the state that the sample is held frozen by mounting a sample holder to a sample rotating stage tiltably with the direction orthogonal to the revolving axis of the rotating sample stage as the axis of inclination.
CONSTITUTION: A cooling tank 6 is provided in a sample chamber 2 and a sample rotating stage 8 is mounted to the central part thereof rotatably about the axis Z by a motor 9. A sample holder chamber 11 of circular cylindrical form is notched in the upper part of the sample stage 8 in the X-axis direction orthogonal to the revolving axis Z of the stage 8. A sample holder 12 is fitted therein in such a manner as to be able to rotate (tilt) around the axis X. The sample holder 12 is of the shape comprising by notching the central part of a circular cylinder and the sample 13 to be vapor-coated is loaded in the recess of the notched part. Vapor coating by an evaporating source 4 is accomplished through the upper opening 14 of the stage 8. To tilt the sample surface with respect to the X axis, the operating lever 18 for tilting is moved in the X' direction.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6243079A JPS55154434A (en) | 1979-05-21 | 1979-05-21 | Vapor coating apparatus for frozen sample |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6243079A JPS55154434A (en) | 1979-05-21 | 1979-05-21 | Vapor coating apparatus for frozen sample |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55154434A true JPS55154434A (en) | 1980-12-02 |
Family
ID=13199941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6243079A Pending JPS55154434A (en) | 1979-05-21 | 1979-05-21 | Vapor coating apparatus for frozen sample |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55154434A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57150553U (en) * | 1981-03-16 | 1982-09-21 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494563B1 (en) * | 1962-05-07 | 1974-02-01 | ||
JPS5451370A (en) * | 1977-09-30 | 1979-04-23 | Hitachi Ltd | Carrier for producing frozen sample of charged-particle beam device |
-
1979
- 1979-05-21 JP JP6243079A patent/JPS55154434A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494563B1 (en) * | 1962-05-07 | 1974-02-01 | ||
JPS5451370A (en) * | 1977-09-30 | 1979-04-23 | Hitachi Ltd | Carrier for producing frozen sample of charged-particle beam device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57150553U (en) * | 1981-03-16 | 1982-09-21 |
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