JPS63192860A - Boat for vacuum deposition - Google Patents
Boat for vacuum depositionInfo
- Publication number
- JPS63192860A JPS63192860A JP2451987A JP2451987A JPS63192860A JP S63192860 A JPS63192860 A JP S63192860A JP 2451987 A JP2451987 A JP 2451987A JP 2451987 A JP2451987 A JP 2451987A JP S63192860 A JPS63192860 A JP S63192860A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- vacuum deposition
- pellets
- vapor deposition
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract description 6
- 238000001704 evaporation Methods 0.000 claims abstract description 21
- 230000008020 evaporation Effects 0.000 claims abstract description 21
- 239000008188 pellet Substances 0.000 claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 9
- 238000007740 vapor deposition Methods 0.000 claims description 23
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 20
- 239000002184 metal Substances 0.000 abstract description 20
- 239000010408 film Substances 0.000 description 18
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は導電性セラミクスよりなる蒸着用ボートＥこ係
り、特に大型陰極線管、例えば大型カラ、−受像管のフ
ェイスパネル内面に低真空で黒色金属膜を形成する場合
に好適な蒸着用ボートに関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a vapor deposition boat E made of conductive ceramics, particularly a large cathode ray tube, such as a large cathode ray tube, and a picture tube. The present invention relates to a vapor deposition boat suitable for forming a metal film.
大型カラー受像管ξこおいては、フェイスパネル内面の
螢光面上ｌこ光反射性金属膜が形成され、また大型であ
るために、マスクドーミング対策として、前記光反射性
金属膜上に更に熱吸収性の良いほぼ黒色の金属薄膜を形
成している。In a large color picture tube, a light reflective metal film is formed on the fluorescent surface of the inner surface of the face panel, and since it is large, an additional layer is formed on the light reflective metal film as a countermeasure against mask doming. It forms a nearly black metal thin film with good heat absorption.
前記光反射性金属膜及び黒色金属薄膜は、共にアルミニ
ウムなどの金属を真空蒸着して形成されるが、光反射性
金属膜は高真空で行うことｌこより、黒色金属薄膜は例
えば１０’Ｔｏｒｒ以下の低真空で行うことにより形成
される。Both the light-reflective metal film and the black metal thin film are formed by vacuum-depositing a metal such as aluminum, but the light-reflective metal film is formed in a high vacuum. Therefore, the black metal thin film is formed at a temperature of, for example, 10' Torr or less. It is formed by performing the process in a low vacuum.
一般ｆこ、高真空領域における蒸着による金属膜形成に
は、第４図に示すように、直方体の一面にアルミニウム
ペレット１を収納する金属溶融溝２ａを有した導電性セ
ラミックスよりなる蒸着ボート２が蒸着源に用いられて
いる。なお、この覆の蒸着用ボートとして、例えば特開
昭５０−６８９３１号公報に示すものが知られている。Generally, for forming a metal film by vapor deposition in a high vacuum region, a vapor deposition boat 2 made of conductive ceramics is used, as shown in FIG. Used as a vapor deposition source. As a boat for vapor deposition of this cover, for example, the one shown in Japanese Patent Application Laid-Open No. 50-68931 is known.
一方、低真空領域における蒸着による金属膜形成には、
第５図に示すように、蒸着源にタングステンヒータコイ
ル３を用い、これにアルミニウムペレット４を吊してい
る。On the other hand, metal film formation by vapor deposition in a low vacuum region requires
As shown in FIG. 5, a tungsten heater coil 3 is used as a vapor deposition source, and aluminum pellets 4 are suspended from this.
上記従来技術は、低真空領域の蒸着においては、第５図
ｉこ示すように、蒸着源ｌこタングステンヒータコイル
３を用いていたので、次のような問題があった。In the above-mentioned prior art, in vapor deposition in a low vacuum region, as shown in FIG. 5, a vapor deposition source l and a tungsten heater coil 3 were used, so there were the following problems.
蒸発金属分子は四方方向に発散するので、無駄が多い。Evaporated metal molecules diverge in all directions, so there is a lot of waste.
またアルミニウムペレット４の自動供給が困難である。Furthermore, it is difficult to automatically supply the aluminum pellets 4.
更ｌこタングステンコイル３は第４図に示す蒸着ボート
２より低寿命である。The tungsten coil 3 has a shorter lifespan than the deposition boat 2 shown in FIG.
ところで、従来、高真空領域の蒸着に用いられていた第
４図に示す蒸着ボート２は、高真空で蒸着を行う際には
問題はないが、低真空で蒸着を行う際Ｅこは、金属分子
の蒸発方向の等方性の点について配慮がされておらず、
金属蒸着面積及び膜厚の不均一性の問題があった。By the way, the evaporation boat 2 shown in FIG. 4, which has been conventionally used for evaporation in a high vacuum region, has no problems when performing evaporation in a high vacuum, but when performing evaporation in a low vacuum, it No consideration was given to isotropy in the direction of evaporation of molecules,
There were problems with non-uniformity in metal deposition area and film thickness.
このことを更に詳記すると、金属分子が蒸発する場合、
特に蒸発面ｆこ対して垂直方向が最も分子速度が速くな
る。従って、平均自由行程の短い低真空領域ｌこ右ける
蒸発において、金属分子の飛散速度は、第６図に示すよ
うに、中心部分が速く、中心部分から離れるに従って極
端ｌこ遅くなり、金属蒸着面積が狭い。また蒸発金属分
子量は中心部分に集中するので、膜厚分布は、第７図に
示すように、中央が厚く、中央から離れるに従って極端
ｌこ薄くなり、膜厚が不均一化する。To explain this further, when metal molecules evaporate,
In particular, the molecular velocity is highest in the direction perpendicular to the evaporation surface f. Therefore, during evaporation in a low vacuum region with a short mean free path, the scattering speed of metal molecules is fast at the center and becomes extremely slow as you move away from the center, as shown in Figure 6. The area is small. Furthermore, since the molecular weight of the evaporated metal is concentrated in the center, the film thickness distribution is thick at the center and becomes extremely thin as it moves away from the center, resulting in non-uniform film thickness, as shown in FIG.
本発明の目的は、蒸着面積の広域化及び膜厚の均一化を
図ることができる蒸着用ボートを提供することｌこある
。An object of the present invention is to provide a vapor deposition boat capable of widening the vapor deposition area and making the film thickness uniform.
上記目的は、導電性セラミックスよりなる蒸着用ボート
１こおいて、少なくともぺＶットを取付ける蒸発面を半
円弧状とすることにより達成される。The above object can be achieved by making the evaporation surface of the evaporation boat 1 made of conductive ceramics into a semicircular arc shape, on which at least the PEV is attached.
蒸発金属分子は、半円弧状の蒸発面より全て最も大きな
分子速度で均一に飛散するので、広域に飛散し、また中
心部分に蒸着膜が集中することがなく、均一な膜が得ら
れる。Since the evaporated metal molecules are all uniformly scattered from the semicircular arc-shaped evaporation surface at the highest molecular velocity, they are scattered over a wide area, and the deposited film is not concentrated in the center, resulting in a uniform film.
以下、本発明の一実施例を第１図により説明する。導電
性セラミックスよりなる蒸着用ボート５は、アルミニウ
ムなどのペレット６を取付けられる蒸発面７が半円弧状
ｉこ形成されている。An embodiment of the present invention will be described below with reference to FIG. An evaporation boat 5 made of conductive ceramics has an evaporation surface 7 formed in a semicircular arc shape to which pellets 6 of aluminum or the like can be attached.
次にかかる蒸着用ボート５の作用を第２図によって説明
する。ぺＶット６を取付けた蒸着用ボート５を真空蒸着
装置８にセットしておく。次に真空蒸着装置８上に被蒸
着物であるフェースパネル９をセットする。そして、図
示しない回転ポンプで真空蒸着装置８内の真空度を約１
０−ｓ’［’Ｏｒ ｒに保ち、蒸着用ボート５を加熱す
る。Next, the operation of the vapor deposition boat 5 will be explained with reference to FIG. The vapor deposition boat 5 with the PEV 6 attached thereto is set in the vacuum vapor deposition apparatus 8. Next, a face panel 9, which is an object to be deposited, is set on the vacuum deposition apparatus 8. Then, the degree of vacuum in the vacuum evaporation device 8 is reduced to about 1 using a rotary pump (not shown).
The vapor deposition boat 5 is heated while maintaining the temperature at 0-s'['Or r.
これＩこより、ペレット６の蒸発金属分子は、蒸発面７
より矢印で示すように全て最も大きな分子速度で均一に
飛散する。従って、金属分子は広域に分散蒸発し、また
中心部分憂こ蒸着膜が集中することがないので、フェー
スパネル９全面にわたり、黒色のアルミ蒸着膜が第３図
Ｅこ示すように均一に形成される。From this I, the evaporated metal molecules of the pellet 6 are
As shown by the arrows, all molecules scatter uniformly at the highest molecular speed. Therefore, the metal molecules are dispersed and evaporated over a wide area, and the deposited film is not concentrated in the central part, so that a black aluminum deposited film is uniformly formed over the entire face panel 9 as shown in FIG. 3E. Ru.
なお、上記実施例においては、蒸着用ボート５の上面の
殆んどを半円弧状に形成したが、ペレット６が取付けら
れる蒸着面７の部分のみを半円弧状としてもよい。In the above embodiment, most of the upper surface of the vapor deposition boat 5 is formed into a semicircular arc shape, but only the portion of the vapor deposition surface 7 to which the pellets 6 are attached may be formed into a semicircular arc shape.
本発明によれば、導電性セラミクスよりなる蒸着用ボー
トのぺＶットが取付けられる蒸発面を半円弧状に形成し
てなるので、低真空領域の蒸着においても、蒸着面積の
広域化及び膜厚の均一化が図れる。また導電性セラミッ
クスの蒸着用ボートを用いることにより、ぺＶットの無
駄がなく、またペレットの自動供給が行え、更ｌこ長寿
命化が図れる。According to the present invention, since the evaporation surface on which the PV of the evaporation boat made of conductive ceramics is attached is formed in a semicircular arc shape, the evaporation area can be expanded and the film The thickness can be made uniform. Furthermore, by using a boat for vapor deposition of conductive ceramics, there is no waste of pellets, and the pellets can be automatically fed, thereby extending the life of the device.
第１図は本発明になる蒸着用ボートの一実施例を示す斜
視図、第２図は第１図の蒸着用ボートによる蒸着状態を
示す説明図、第３図は第２図の場合の膜厚分布図、第４
図は従来の蒸着用ボートの斜視図、第５図は従来のタン
グステンヒータコイルの斜視図、第６図は第４図の場合
の金属分子の飛散速度を示す説明図、第７図は第６図の
場合の膜厚分布図である。
５・・・蒸着用ボート、 ６・・・ペレット、
７・・・蒸発面。FIG. 1 is a perspective view showing an embodiment of the vapor deposition boat according to the present invention, FIG. 2 is an explanatory diagram showing the state of vapor deposition by the vapor deposition boat of FIG. 1, and FIG. 3 is a film in the case of FIG. 2. Thickness distribution map, 4th
Figure 5 is a perspective view of a conventional evaporation boat, Figure 5 is a perspective view of a conventional tungsten heater coil, Figure 6 is an explanatory diagram showing the scattering speed of metal molecules in the case of Figure 4, and Figure 7 is a perspective view of a conventional tungsten heater coil. It is a film thickness distribution diagram for the case shown in the figure. 5... Deposition boat, 6... Pellet,
7...Evaporation surface.
Claims (1)
少なくともアルミニウムなどのペレットを取付ける蒸発
面を半円弧状に形成したことを特徴とする蒸着用ボート
。1. In a vapor deposition boat made of conductive ceramics,
An evaporation boat characterized in that the evaporation surface on which pellets of aluminum or the like are attached is formed in a semicircular arc shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2451987A JPS63192860A (en) | 1987-02-06 | 1987-02-06 | Boat for vacuum deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2451987A JPS63192860A (en) | 1987-02-06 | 1987-02-06 | Boat for vacuum deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63192860A true JPS63192860A (en) | 1988-08-10 |
Family
ID=12140416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2451987A Pending JPS63192860A (en) | 1987-02-06 | 1987-02-06 | Boat for vacuum deposition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63192860A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0962546A1 (en) * | 1998-05-28 | 1999-12-08 | Elektroschmelzwerk Kempten GmbH | Elliptical ceramic evaporator |
| EP1103629A1 (en) * | 1999-11-25 | 2001-05-30 | Elektroschmelzwerk Kempten GmbH | Ceramic evaporator |
| WO2006133779A2 (en) * | 2005-06-14 | 2006-12-21 | Leybold Optics Gmbh | Evaporator boat for a device for coating substrates |
-
1987
- 1987-02-06 JP JP2451987A patent/JPS63192860A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0962546A1 (en) * | 1998-05-28 | 1999-12-08 | Elektroschmelzwerk Kempten GmbH | Elliptical ceramic evaporator |
| US6085025A (en) * | 1998-05-28 | 2000-07-04 | Elektroschmelzwerk Kempten Gmbh | Elliptical ceramic evaporators |
| EP1103629A1 (en) * | 1999-11-25 | 2001-05-30 | Elektroschmelzwerk Kempten GmbH | Ceramic evaporator |
| US6411775B1 (en) | 1999-11-25 | 2002-06-25 | Wacker-Chemie Gmbh | Ceramic flash TV evaporator |
| WO2006133779A2 (en) * | 2005-06-14 | 2006-12-21 | Leybold Optics Gmbh | Evaporator boat for a device for coating substrates |
| WO2006133779A3 (en) * | 2005-06-14 | 2007-04-26 | Leybold Optics Gmbh | Evaporator boat for a device for coating substrates |
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