WO2006133779A3 - Evaporator boat for a device for coating substrates - Google Patents

Evaporator boat for a device for coating substrates Download PDF

Info

Publication number
WO2006133779A3
WO2006133779A3 PCT/EP2006/004430 EP2006004430W WO2006133779A3 WO 2006133779 A3 WO2006133779 A3 WO 2006133779A3 EP 2006004430 W EP2006004430 W EP 2006004430W WO 2006133779 A3 WO2006133779 A3 WO 2006133779A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating substrates
evaporator boat
boat
evaporator
substrates
Prior art date
Application number
PCT/EP2006/004430
Other languages
German (de)
French (fr)
Other versions
WO2006133779A2 (en
Inventor
Uwe Braun
Original Assignee
Leybold Optics Gmbh
Uwe Braun
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Optics Gmbh, Uwe Braun filed Critical Leybold Optics Gmbh
Publication of WO2006133779A2 publication Critical patent/WO2006133779A2/en
Publication of WO2006133779A3 publication Critical patent/WO2006133779A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Abstract

The invention relates to an evaporator boat for a device for coating substrates in a vacuum coating chamber, which can be heated by direct current passage and has a convexly curved evaporation surface.
PCT/EP2006/004430 2005-06-14 2006-05-11 Evaporator boat for a device for coating substrates WO2006133779A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005027382A DE102005027382B4 (en) 2005-06-14 2005-06-14 Evaporator boat for a device for coating substrates
DE102005027382.3 2005-06-14

Publications (2)

Publication Number Publication Date
WO2006133779A2 WO2006133779A2 (en) 2006-12-21
WO2006133779A3 true WO2006133779A3 (en) 2007-04-26

Family

ID=37489623

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/004430 WO2006133779A2 (en) 2005-06-14 2006-05-11 Evaporator boat for a device for coating substrates

Country Status (2)

Country Link
DE (1) DE102005027382B4 (en)
WO (1) WO2006133779A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107686966B (en) * 2017-07-31 2019-09-24 武汉华星光电半导体显示技术有限公司 Evaporation coating device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1521471A1 (en) * 1964-04-30 1969-05-22 Poudres Metalliques Et Des All Process for plating objects by vapor deposition of metals or metalloids
JPS63192860A (en) * 1987-02-06 1988-08-10 Hitachi Ltd Boat for vacuum deposition
US6120286A (en) * 1996-12-05 2000-09-19 Sintec Keramik Gmbh & Co. Kg Vaporizer boat for metal vaporizing
WO2004063419A1 (en) * 2003-01-08 2004-07-29 Sintec Keramik Gmbh & Co. Kg Resistance-heated vaporizer boat

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2996412A (en) * 1958-10-10 1961-08-15 Continental Can Co Art of depositing metals
US4089643A (en) * 1976-03-19 1978-05-16 Gte Sylvania Incorporated Self-resistance-heated evaporation boat
DE4139792A1 (en) * 1991-12-03 1993-06-09 Leybold Ag, 6450 Hanau, De EVAPORATOR SHIPS FOR A DEVICE FOR COATING SUBSTRATES
JPH05182196A (en) * 1991-12-27 1993-07-23 Sony Corp Formation of thin film and device therefor and crucible for vacuum vapor deposition
DE19545914C1 (en) * 1995-12-08 1996-11-07 Sintec Keramik Gmbh Ceramic boat for use in vaporising metals, esp. aluminium@, in coating processes
DE19823908A1 (en) * 1998-05-28 1999-12-02 Kempten Elektroschmelz Gmbh Elliptical ceramic evaporator
DE10200909A1 (en) * 2002-01-12 2003-07-24 Applied Films Gmbh & Co Kg Evaporator boat for a device for coating substrates
DE20309444U1 (en) * 2003-06-18 2003-09-25 Sintec Keramik Gmbh & Co Kg Resistance-heated ceramic boat for metal vaporization has parallel top and base with sloping sides and recessed underside at ends

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1521471A1 (en) * 1964-04-30 1969-05-22 Poudres Metalliques Et Des All Process for plating objects by vapor deposition of metals or metalloids
JPS63192860A (en) * 1987-02-06 1988-08-10 Hitachi Ltd Boat for vacuum deposition
US6120286A (en) * 1996-12-05 2000-09-19 Sintec Keramik Gmbh & Co. Kg Vaporizer boat for metal vaporizing
WO2004063419A1 (en) * 2003-01-08 2004-07-29 Sintec Keramik Gmbh & Co. Kg Resistance-heated vaporizer boat

Also Published As

Publication number Publication date
DE102005027382B4 (en) 2010-01-28
WO2006133779A2 (en) 2006-12-21
DE102005027382A1 (en) 2006-12-21

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Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
122 Ep: pct application non-entry in european phase

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