JPS5454586A - Electron beam programmable semiconductor structure - Google Patents
Electron beam programmable semiconductor structureInfo
- Publication number
- JPS5454586A JPS5454586A JP11447278A JP11447278A JPS5454586A JP S5454586 A JPS5454586 A JP S5454586A JP 11447278 A JP11447278 A JP 11447278A JP 11447278 A JP11447278 A JP 11447278A JP S5454586 A JPS5454586 A JP S5454586A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- semiconductor structure
- programmable semiconductor
- beam programmable
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10P34/40—
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
- G11C13/047—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam using electro-optical elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/06—Arrangements for interconnecting storage elements electrically, e.g. by wiring
- G11C5/066—Means for reducing external access-lines for a semiconductor memory clip, e.g. by multiplexing at least address and data signals
Landscapes
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/834,081 US4190849A (en) | 1977-09-19 | 1977-09-19 | Electronic-beam programmable semiconductor device structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5454586A true JPS5454586A (en) | 1979-04-28 |
Family
ID=25266062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11447278A Pending JPS5454586A (en) | 1977-09-19 | 1978-09-18 | Electron beam programmable semiconductor structure |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4190849A (enExample) |
| JP (1) | JPS5454586A (enExample) |
| DE (1) | DE2840577A1 (enExample) |
| FR (1) | FR2403649A1 (enExample) |
| GB (1) | GB2004689B (enExample) |
| HK (1) | HK66384A (enExample) |
| MY (1) | MY8500490A (enExample) |
| NL (1) | NL7809449A (enExample) |
| SG (1) | SG18084G (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010029618A1 (ja) * | 2008-09-10 | 2010-03-18 | 株式会社アドバンテスト | メモリデバイス、メモリデバイスの製造方法、およびデータ書込方法 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3032306A1 (de) * | 1980-08-27 | 1982-04-08 | Siemens AG, 1000 Berlin und 8000 München | Monolithisch integrierte schaltung mit zu- und/oder abschaltbaren schaltungsteilen |
| DE3032333A1 (de) * | 1980-08-27 | 1982-04-22 | Siemens AG, 1000 Berlin und 8000 München | Monolithische statische speicherzelle und verfahren zu ihrem betrieb |
| DE3032295A1 (de) * | 1980-08-27 | 1982-04-01 | Siemens AG, 1000 Berlin und 8000 München | Monolithisch integrierter festwertspeicher |
| US4473836A (en) * | 1982-05-03 | 1984-09-25 | Dalsa Inc. | Integrable large dynamic range photodetector element for linear and area integrated circuit imaging arrays |
| JPS6273653A (ja) * | 1985-09-26 | 1987-04-04 | Mitsubishi Electric Corp | 容量回路構造 |
| US11688586B2 (en) * | 2018-08-30 | 2023-06-27 | Tokyo Electron Limited | Method and apparatus for plasma processing |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3500142A (en) * | 1967-06-05 | 1970-03-10 | Bell Telephone Labor Inc | Field effect semiconductor apparatus with memory involving entrapment of charge carriers |
| US3573753A (en) * | 1968-08-01 | 1971-04-06 | Gen Electric | Information storage and retrieval employing an electron beam |
| US3886530A (en) * | 1969-06-02 | 1975-05-27 | Massachusetts Inst Technology | Signal storage device |
| US3660819A (en) * | 1970-06-15 | 1972-05-02 | Intel Corp | Floating gate transistor and method for charging and discharging same |
| US3721962A (en) * | 1970-08-03 | 1973-03-20 | Ncr | Beam accessed mos memory with beam reading,writing,and erasing |
| US3825946A (en) * | 1971-01-15 | 1974-07-23 | Intel Corp | Electrically alterable floating gate device and method for altering same |
| US3736571A (en) * | 1971-02-10 | 1973-05-29 | Micro Bit Corp | Method and system for improved operation of conductor-insulator-semiconductor capacitor memory having increased storage capability |
| US3761895A (en) * | 1971-03-17 | 1973-09-25 | Gen Electric | Method and apparatus for storing and reading out charge in an insulating layer |
| US4087795A (en) * | 1974-09-20 | 1978-05-02 | Siemens Aktiengesellschaft | Memory field effect storage device |
| US4079358A (en) * | 1976-10-04 | 1978-03-14 | Micro-Bit Corporation | Buried junction MOS memory capacitor target for electron beam addressable memory and method of using same |
-
1977
- 1977-09-19 US US05/834,081 patent/US4190849A/en not_active Expired - Lifetime
-
1978
- 1978-08-18 GB GB7833832A patent/GB2004689B/en not_active Expired
- 1978-09-15 NL NL7809449A patent/NL7809449A/xx unknown
- 1978-09-18 JP JP11447278A patent/JPS5454586A/ja active Pending
- 1978-09-18 DE DE19782840577 patent/DE2840577A1/de not_active Withdrawn
- 1978-09-19 FR FR7826862A patent/FR2403649A1/fr active Pending
-
1984
- 1984-02-29 SG SG180/84A patent/SG18084G/en unknown
- 1984-08-23 HK HK663/84A patent/HK66384A/xx unknown
-
1985
- 1985-12-30 MY MY490/85A patent/MY8500490A/xx unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010029618A1 (ja) * | 2008-09-10 | 2010-03-18 | 株式会社アドバンテスト | メモリデバイス、メモリデバイスの製造方法、およびデータ書込方法 |
| JPWO2010029618A1 (ja) * | 2008-09-10 | 2012-02-02 | 株式会社アドバンテスト | メモリデバイス、メモリデバイスの製造方法、およびデータ書込方法 |
| US8369126B2 (en) | 2008-09-10 | 2013-02-05 | Advantest Corporation | Memory device, manufacturing method for memory device and method for data writing |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2403649A1 (enExample) | 1979-04-13 |
| MY8500490A (en) | 1985-12-31 |
| DE2840577A1 (de) | 1979-03-22 |
| HK66384A (en) | 1984-08-31 |
| US4190849A (en) | 1980-02-26 |
| SG18084G (en) | 1985-03-08 |
| NL7809449A (nl) | 1979-03-21 |
| GB2004689A (en) | 1979-04-04 |
| GB2004689B (en) | 1982-05-12 |
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