JPS5454568A - Method of growing gas phase epitaxial of compound semiconductor - Google Patents

Method of growing gas phase epitaxial of compound semiconductor

Info

Publication number
JPS5454568A
JPS5454568A JP12132977A JP12132977A JPS5454568A JP S5454568 A JPS5454568 A JP S5454568A JP 12132977 A JP12132977 A JP 12132977A JP 12132977 A JP12132977 A JP 12132977A JP S5454568 A JPS5454568 A JP S5454568A
Authority
JP
Japan
Prior art keywords
gas phase
compound semiconductor
phase epitaxial
growing gas
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12132977A
Other languages
Japanese (ja)
Other versions
JPS5620687B2 (en
Inventor
Shinichi Hasegawa
Hisanori Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Polytec Co
Original Assignee
Mitsubishi Monsanto Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Monsanto Chemical Co filed Critical Mitsubishi Monsanto Chemical Co
Priority to JP12132977A priority Critical patent/JPS5454568A/en
Publication of JPS5454568A publication Critical patent/JPS5454568A/en
Publication of JPS5620687B2 publication Critical patent/JPS5620687B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP12132977A 1977-10-08 1977-10-08 Method of growing gas phase epitaxial of compound semiconductor Granted JPS5454568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12132977A JPS5454568A (en) 1977-10-08 1977-10-08 Method of growing gas phase epitaxial of compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12132977A JPS5454568A (en) 1977-10-08 1977-10-08 Method of growing gas phase epitaxial of compound semiconductor

Publications (2)

Publication Number Publication Date
JPS5454568A true JPS5454568A (en) 1979-04-28
JPS5620687B2 JPS5620687B2 (en) 1981-05-15

Family

ID=14808550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12132977A Granted JPS5454568A (en) 1977-10-08 1977-10-08 Method of growing gas phase epitaxial of compound semiconductor

Country Status (1)

Country Link
JP (1) JPS5454568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60216537A (en) * 1984-04-11 1985-10-30 Shin Etsu Handotai Co Ltd Vapor growth method of compound semiconductor single crystal epitaxial film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60216537A (en) * 1984-04-11 1985-10-30 Shin Etsu Handotai Co Ltd Vapor growth method of compound semiconductor single crystal epitaxial film

Also Published As

Publication number Publication date
JPS5620687B2 (en) 1981-05-15

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