JPS5465474A - Method of growing silicon membrane in gas phase - Google Patents

Method of growing silicon membrane in gas phase

Info

Publication number
JPS5465474A
JPS5465474A JP13148977A JP13148977A JPS5465474A JP S5465474 A JPS5465474 A JP S5465474A JP 13148977 A JP13148977 A JP 13148977A JP 13148977 A JP13148977 A JP 13148977A JP S5465474 A JPS5465474 A JP S5465474A
Authority
JP
Japan
Prior art keywords
gas phase
silicon membrane
growing silicon
growing
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13148977A
Other languages
Japanese (ja)
Other versions
JPS57642B2 (en
Inventor
Harushige Kurokawa
Yoshihide Endou
Masuo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP13148977A priority Critical patent/JPS5465474A/en
Publication of JPS5465474A publication Critical patent/JPS5465474A/en
Publication of JPS57642B2 publication Critical patent/JPS57642B2/ja
Granted legal-status Critical Current

Links

JP13148977A 1977-11-04 1977-11-04 Method of growing silicon membrane in gas phase Granted JPS5465474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13148977A JPS5465474A (en) 1977-11-04 1977-11-04 Method of growing silicon membrane in gas phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13148977A JPS5465474A (en) 1977-11-04 1977-11-04 Method of growing silicon membrane in gas phase

Publications (2)

Publication Number Publication Date
JPS5465474A true JPS5465474A (en) 1979-05-26
JPS57642B2 JPS57642B2 (en) 1982-01-07

Family

ID=15059179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13148977A Granted JPS5465474A (en) 1977-11-04 1977-11-04 Method of growing silicon membrane in gas phase

Country Status (1)

Country Link
JP (1) JPS5465474A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6395617A (en) * 1986-10-03 1988-04-26 ダウ・コーニング・コーポレーシヨン Method of forming film containing amorphous polymer silicon
US7358197B2 (en) * 2003-10-23 2008-04-15 United Microelectronics Corp. Method for avoiding polysilicon film over etch abnormal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6395617A (en) * 1986-10-03 1988-04-26 ダウ・コーニング・コーポレーシヨン Method of forming film containing amorphous polymer silicon
US7358197B2 (en) * 2003-10-23 2008-04-15 United Microelectronics Corp. Method for avoiding polysilicon film over etch abnormal

Also Published As

Publication number Publication date
JPS57642B2 (en) 1982-01-07

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