JPS5491050A - Method of growing vapor of compound semiconductor epitaxial film - Google Patents
Method of growing vapor of compound semiconductor epitaxial filmInfo
- Publication number
- JPS5491050A JPS5491050A JP15833177A JP15833177A JPS5491050A JP S5491050 A JPS5491050 A JP S5491050A JP 15833177 A JP15833177 A JP 15833177A JP 15833177 A JP15833177 A JP 15833177A JP S5491050 A JPS5491050 A JP S5491050A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- epitaxial film
- semiconductor epitaxial
- growing vapor
- growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15833177A JPS5491050A (en) | 1977-12-28 | 1977-12-28 | Method of growing vapor of compound semiconductor epitaxial film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15833177A JPS5491050A (en) | 1977-12-28 | 1977-12-28 | Method of growing vapor of compound semiconductor epitaxial film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5491050A true JPS5491050A (en) | 1979-07-19 |
JPS6158971B2 JPS6158971B2 (en) | 1986-12-13 |
Family
ID=15669295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15833177A Granted JPS5491050A (en) | 1977-12-28 | 1977-12-28 | Method of growing vapor of compound semiconductor epitaxial film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5491050A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01152960A (en) * | 1987-12-07 | 1989-06-15 | Sansha Electric Mfg Co Ltd | Arc power source device |
-
1977
- 1977-12-28 JP JP15833177A patent/JPS5491050A/en active Granted
Non-Patent Citations (1)
Title |
---|
JOURNAL OF APPLIED PHYSICS#V46#M4=1975 * |
Also Published As
Publication number | Publication date |
---|---|
JPS6158971B2 (en) | 1986-12-13 |
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