JPS5452461A - Ion source - Google Patents

Ion source

Info

Publication number
JPS5452461A
JPS5452461A JP11931977A JP11931977A JPS5452461A JP S5452461 A JPS5452461 A JP S5452461A JP 11931977 A JP11931977 A JP 11931977A JP 11931977 A JP11931977 A JP 11931977A JP S5452461 A JPS5452461 A JP S5452461A
Authority
JP
Japan
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11931977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262020B2 (enrdf_load_html_response
Inventor
Kouji Matsuda
Susumu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin High Voltage Co Ltd
Original Assignee
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin High Voltage Co Ltd filed Critical Nissin High Voltage Co Ltd
Priority to JP11931977A priority Critical patent/JPS5452461A/ja
Publication of JPS5452461A publication Critical patent/JPS5452461A/ja
Publication of JPS6262020B2 publication Critical patent/JPS6262020B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11931977A 1977-10-03 1977-10-03 Ion source Granted JPS5452461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11931977A JPS5452461A (en) 1977-10-03 1977-10-03 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11931977A JPS5452461A (en) 1977-10-03 1977-10-03 Ion source

Publications (2)

Publication Number Publication Date
JPS5452461A true JPS5452461A (en) 1979-04-25
JPS6262020B2 JPS6262020B2 (enrdf_load_html_response) 1987-12-24

Family

ID=14758501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11931977A Granted JPS5452461A (en) 1977-10-03 1977-10-03 Ion source

Country Status (1)

Country Link
JP (1) JPS5452461A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276218U (enrdf_load_html_response) * 1988-11-29 1990-06-12

Also Published As

Publication number Publication date
JPS6262020B2 (enrdf_load_html_response) 1987-12-24

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