JPS5451863A - Surface roughness measuring apparatus - Google Patents

Surface roughness measuring apparatus

Info

Publication number
JPS5451863A
JPS5451863A JP11832777A JP11832777A JPS5451863A JP S5451863 A JPS5451863 A JP S5451863A JP 11832777 A JP11832777 A JP 11832777A JP 11832777 A JP11832777 A JP 11832777A JP S5451863 A JPS5451863 A JP S5451863A
Authority
JP
Japan
Prior art keywords
measured
light
roughness
mean contrast
radiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11832777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122762B2 (enrdf_load_stackoverflow
Inventor
Toshimitsu Asakura
Mitsuru Oishi
Kenji Iwahashi
Shigeo Kawasue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11832777A priority Critical patent/JPS5451863A/ja
Publication of JPS5451863A publication Critical patent/JPS5451863A/ja
Publication of JPS6122762B2 publication Critical patent/JPS6122762B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP11832777A 1977-09-30 1977-09-30 Surface roughness measuring apparatus Granted JPS5451863A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11832777A JPS5451863A (en) 1977-09-30 1977-09-30 Surface roughness measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11832777A JPS5451863A (en) 1977-09-30 1977-09-30 Surface roughness measuring apparatus

Publications (2)

Publication Number Publication Date
JPS5451863A true JPS5451863A (en) 1979-04-24
JPS6122762B2 JPS6122762B2 (enrdf_load_stackoverflow) 1986-06-03

Family

ID=14733914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11832777A Granted JPS5451863A (en) 1977-09-30 1977-09-30 Surface roughness measuring apparatus

Country Status (1)

Country Link
JP (1) JPS5451863A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100394162C (zh) * 2003-01-23 2008-06-11 友达光电股份有限公司 分析薄膜表面粗糙度的方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263381U (enrdf_load_stackoverflow) * 1988-11-01 1990-05-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100394162C (zh) * 2003-01-23 2008-06-11 友达光电股份有限公司 分析薄膜表面粗糙度的方法

Also Published As

Publication number Publication date
JPS6122762B2 (enrdf_load_stackoverflow) 1986-06-03

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