JPS5451863A - Surface roughness measuring apparatus - Google Patents

Surface roughness measuring apparatus

Info

Publication number
JPS5451863A
JPS5451863A JP11832777A JP11832777A JPS5451863A JP S5451863 A JPS5451863 A JP S5451863A JP 11832777 A JP11832777 A JP 11832777A JP 11832777 A JP11832777 A JP 11832777A JP S5451863 A JPS5451863 A JP S5451863A
Authority
JP
Japan
Prior art keywords
roughness
measured
light
mean contrast
radiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11832777A
Other languages
Japanese (ja)
Other versions
JPS6122762B2 (en
Inventor
Toshimitsu Asakura
Mitsuru Oishi
Kenji Iwahashi
Shigeo Kawasue
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11832777A priority Critical patent/JPS6122762B2/ja
Publication of JPS5451863A publication Critical patent/JPS5451863A/en
Publication of JPS6122762B2 publication Critical patent/JPS6122762B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To make possible the comparative inspection and a bsolute value measurement of the roughness of the surface being measured by changing the distance between the radiated surface and receiving (observing) surface of coherent light and radiation area.
CONSTITUTION: At the time of measuring surface roughness by radiating the coherent light from a laser light source 1 to the surface of the specimen being measured 8 through a mirror 2, reverse telescope type optical systems 3, 4, an aperture 5, a focusing lens 6, detecting the reflected light with a photoelectrid detector 9 through the scanning plate 10 having a pinhole on a light receiving face 11, inputting the same in a signal analyzer 12 and calculating the mean contrast of speckle pattern, a variable slit is installed in the aperture 5 to let the light radiation area of the spcimen being measured 8 be changed and the absolute value of the surface roughness is measured based on the change in mean contrast based on this, then the photoelectric detector 9 and scanning plate 10 are moved along the reflecting light axis (b) and based on the change in the mean contrast, the comparative inspection of the roughness of the surface being radiated is performed
COPYRIGHT: (C)1979,JPO&Japio
JP11832777A 1977-09-30 1977-09-30 Expired JPS6122762B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11832777A JPS6122762B2 (en) 1977-09-30 1977-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11832777A JPS6122762B2 (en) 1977-09-30 1977-09-30

Publications (2)

Publication Number Publication Date
JPS5451863A true JPS5451863A (en) 1979-04-24
JPS6122762B2 JPS6122762B2 (en) 1986-06-03

Family

ID=14733914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11832777A Expired JPS6122762B2 (en) 1977-09-30 1977-09-30

Country Status (1)

Country Link
JP (1) JPS6122762B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100394162C (en) * 2003-01-23 2008-06-11 友达光电股份有限公司 Method for analyzing roughness on surface of film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263381U (en) * 1988-11-01 1990-05-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100394162C (en) * 2003-01-23 2008-06-11 友达光电股份有限公司 Method for analyzing roughness on surface of film

Also Published As

Publication number Publication date
JPS6122762B2 (en) 1986-06-03

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