JPS5451863A - Surface roughness measuring apparatus - Google Patents
Surface roughness measuring apparatusInfo
- Publication number
- JPS5451863A JPS5451863A JP11832777A JP11832777A JPS5451863A JP S5451863 A JPS5451863 A JP S5451863A JP 11832777 A JP11832777 A JP 11832777A JP 11832777 A JP11832777 A JP 11832777A JP S5451863 A JPS5451863 A JP S5451863A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- roughness
- mean contrast
- radiated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To make possible the comparative inspection and a bsolute value measurement of the roughness of the surface being measured by changing the distance between the radiated surface and receiving (observing) surface of coherent light and radiation area.
CONSTITUTION: At the time of measuring surface roughness by radiating the coherent light from a laser light source 1 to the surface of the specimen being measured 8 through a mirror 2, reverse telescope type optical systems 3, 4, an aperture 5, a focusing lens 6, detecting the reflected light with a photoelectrid detector 9 through the scanning plate 10 having a pinhole on a light receiving face 11, inputting the same in a signal analyzer 12 and calculating the mean contrast of speckle pattern, a variable slit is installed in the aperture 5 to let the light radiation area of the spcimen being measured 8 be changed and the absolute value of the surface roughness is measured based on the change in mean contrast based on this, then the photoelectric detector 9 and scanning plate 10 are moved along the reflecting light axis (b) and based on the change in the mean contrast, the comparative inspection of the roughness of the surface being radiated is performed
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11832777A JPS5451863A (en) | 1977-09-30 | 1977-09-30 | Surface roughness measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11832777A JPS5451863A (en) | 1977-09-30 | 1977-09-30 | Surface roughness measuring apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5451863A true JPS5451863A (en) | 1979-04-24 |
JPS6122762B2 JPS6122762B2 (en) | 1986-06-03 |
Family
ID=14733914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11832777A Granted JPS5451863A (en) | 1977-09-30 | 1977-09-30 | Surface roughness measuring apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5451863A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100394162C (en) * | 2003-01-23 | 2008-06-11 | 友达光电股份有限公司 | Method for analyzing roughness on surface of film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0263381U (en) * | 1988-11-01 | 1990-05-11 |
-
1977
- 1977-09-30 JP JP11832777A patent/JPS5451863A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100394162C (en) * | 2003-01-23 | 2008-06-11 | 友达光电股份有限公司 | Method for analyzing roughness on surface of film |
Also Published As
Publication number | Publication date |
---|---|
JPS6122762B2 (en) | 1986-06-03 |
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