JPS544082A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS544082A JPS544082A JP6931177A JP6931177A JPS544082A JP S544082 A JPS544082 A JP S544082A JP 6931177 A JP6931177 A JP 6931177A JP 6931177 A JP6931177 A JP 6931177A JP S544082 A JPS544082 A JP S544082A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- decreasing
- dispersion
- error
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6931177A JPS544082A (en) | 1977-06-10 | 1977-06-10 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6931177A JPS544082A (en) | 1977-06-10 | 1977-06-10 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS544082A true JPS544082A (en) | 1979-01-12 |
Family
ID=13398881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6931177A Pending JPS544082A (en) | 1977-06-10 | 1977-06-10 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544082A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS514837A (ja) * | 1974-07-01 | 1976-01-16 | Takenaka Komuten Co | Kadoshikihinanbarukonii |
JPS51118384A (en) * | 1975-04-10 | 1976-10-18 | Matsushita Electric Ind Co Ltd | Manufacturing prouss for mos type semiconductor unit |
JPS5267963A (en) * | 1975-12-04 | 1977-06-06 | Mitsubishi Electric Corp | Manufacture of semiconductor unit |
-
1977
- 1977-06-10 JP JP6931177A patent/JPS544082A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS514837A (ja) * | 1974-07-01 | 1976-01-16 | Takenaka Komuten Co | Kadoshikihinanbarukonii |
JPS51118384A (en) * | 1975-04-10 | 1976-10-18 | Matsushita Electric Ind Co Ltd | Manufacturing prouss for mos type semiconductor unit |
JPS5267963A (en) * | 1975-12-04 | 1977-06-06 | Mitsubishi Electric Corp | Manufacture of semiconductor unit |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS53108390A (en) | Semiconductor device and its manufacture | |
JPS53135263A (en) | Production of semiconductor device | |
JPS5394770A (en) | Photo mask | |
JPS544082A (en) | Manufacture for semiconductor device | |
JPS5292486A (en) | Manufacture of mis-type semiconductor device | |
JPS52113687A (en) | Production of semiconductor device | |
JPS51136289A (en) | Semi-conductor producing | |
JPS544081A (en) | Manufacture for semiconductor device | |
JPS5726467A (en) | Manufacture of semiconductor device | |
JPS531471A (en) | Manufacture for semiconductor device | |
JPS52154367A (en) | Production of semiconductor device | |
JPS51118392A (en) | Manuforcturing process for semiconductor unit | |
JPS538073A (en) | Mis type semiconductor device | |
JPS533081A (en) | Integrated circuit wiring method | |
JPS53129981A (en) | Production of semiconductor device | |
JPS52124860A (en) | Electrode formation method for semiconductor devices | |
JPS5370769A (en) | Production of semiconductor device | |
JPS52122479A (en) | Etching solution of silicon | |
JPS5419367A (en) | Production of semiconductor device | |
JPS53112673A (en) | Mask alignment method in semiconductor device manufacturing process and photo mask used for its execution | |
JPS534476A (en) | Mask alignment method to semiconductor substrate | |
JPS53123678A (en) | Manufacture of field effect semiconductor device of insulation gate type | |
JPS5377168A (en) | Production of semiconductor device | |
JPS543470A (en) | Etching method | |
JPS5251872A (en) | Production of semiconductor device |