JPS5434778A - Mask aligner - Google Patents
Mask alignerInfo
- Publication number
- JPS5434778A JPS5434778A JP10049477A JP10049477A JPS5434778A JP S5434778 A JPS5434778 A JP S5434778A JP 10049477 A JP10049477 A JP 10049477A JP 10049477 A JP10049477 A JP 10049477A JP S5434778 A JPS5434778 A JP S5434778A
- Authority
- JP
- Japan
- Prior art keywords
- mask aligner
- mask
- blowing
- circumference
- separating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52100494A JPS5952536B2 (en) | 1977-08-24 | 1977-08-24 | mask aligner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52100494A JPS5952536B2 (en) | 1977-08-24 | 1977-08-24 | mask aligner |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5434778A true JPS5434778A (en) | 1979-03-14 |
JPS5952536B2 JPS5952536B2 (en) | 1984-12-20 |
Family
ID=14275470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52100494A Expired JPS5952536B2 (en) | 1977-08-24 | 1977-08-24 | mask aligner |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5952536B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55130542A (en) * | 1979-03-30 | 1980-10-09 | Fujitsu Ltd | Exposing method |
US20100291289A1 (en) * | 2009-05-13 | 2010-11-18 | Samsung Electro-Mechanics Co., Ltd. | Bump printing apparatus and method of controlling the same |
-
1977
- 1977-08-24 JP JP52100494A patent/JPS5952536B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55130542A (en) * | 1979-03-30 | 1980-10-09 | Fujitsu Ltd | Exposing method |
US20100291289A1 (en) * | 2009-05-13 | 2010-11-18 | Samsung Electro-Mechanics Co., Ltd. | Bump printing apparatus and method of controlling the same |
US8297486B2 (en) * | 2009-05-13 | 2012-10-30 | Samsung Electro-Mechanics Co., Ltd. | Bump printing apparatus and method of controlling the same |
US8408449B2 (en) | 2009-05-13 | 2013-04-02 | Samsung Electro-Mechanics Co., Ltd. | Method of controlling bump printing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5952536B2 (en) | 1984-12-20 |
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Legal Events
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EXPY | Cancellation because of completion of term |