JPS5432069A - Plasma etching reaction final point detecting system - Google Patents

Plasma etching reaction final point detecting system

Info

Publication number
JPS5432069A
JPS5432069A JP9788977A JP9788977A JPS5432069A JP S5432069 A JPS5432069 A JP S5432069A JP 9788977 A JP9788977 A JP 9788977A JP 9788977 A JP9788977 A JP 9788977A JP S5432069 A JPS5432069 A JP S5432069A
Authority
JP
Japan
Prior art keywords
plasma etching
detecting system
point detecting
etching reaction
final point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9788977A
Other languages
Japanese (ja)
Inventor
Yoshinori Kureishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP9788977A priority Critical patent/JPS5432069A/en
Publication of JPS5432069A publication Critical patent/JPS5432069A/en
Pending legal-status Critical Current

Links

JP9788977A 1977-08-17 1977-08-17 Plasma etching reaction final point detecting system Pending JPS5432069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9788977A JPS5432069A (en) 1977-08-17 1977-08-17 Plasma etching reaction final point detecting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9788977A JPS5432069A (en) 1977-08-17 1977-08-17 Plasma etching reaction final point detecting system

Publications (1)

Publication Number Publication Date
JPS5432069A true JPS5432069A (en) 1979-03-09

Family

ID=14204308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9788977A Pending JPS5432069A (en) 1977-08-17 1977-08-17 Plasma etching reaction final point detecting system

Country Status (1)

Country Link
JP (1) JPS5432069A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62165935A (en) * 1986-01-17 1987-07-22 Tokyo Electron Ltd Detector for end point of ashing
JPS62165934A (en) * 1986-01-17 1987-07-22 Tokyo Electron Ltd Detecting method for end point of ashing
JP2012012241A (en) * 2010-06-30 2012-01-19 Mitsubishi Materials Corp Production method and apparatus in which corrosive gas such as ruthenium tetroxide generates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62165935A (en) * 1986-01-17 1987-07-22 Tokyo Electron Ltd Detector for end point of ashing
JPS62165934A (en) * 1986-01-17 1987-07-22 Tokyo Electron Ltd Detecting method for end point of ashing
JP2012012241A (en) * 2010-06-30 2012-01-19 Mitsubishi Materials Corp Production method and apparatus in which corrosive gas such as ruthenium tetroxide generates

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