JPS5432069A - Plasma etching reaction final point detecting system - Google Patents
Plasma etching reaction final point detecting systemInfo
- Publication number
- JPS5432069A JPS5432069A JP9788977A JP9788977A JPS5432069A JP S5432069 A JPS5432069 A JP S5432069A JP 9788977 A JP9788977 A JP 9788977A JP 9788977 A JP9788977 A JP 9788977A JP S5432069 A JPS5432069 A JP S5432069A
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- detecting system
- point detecting
- etching reaction
- final point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9788977A JPS5432069A (en) | 1977-08-17 | 1977-08-17 | Plasma etching reaction final point detecting system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9788977A JPS5432069A (en) | 1977-08-17 | 1977-08-17 | Plasma etching reaction final point detecting system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5432069A true JPS5432069A (en) | 1979-03-09 |
Family
ID=14204308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9788977A Pending JPS5432069A (en) | 1977-08-17 | 1977-08-17 | Plasma etching reaction final point detecting system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432069A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165935A (en) * | 1986-01-17 | 1987-07-22 | Tokyo Electron Ltd | Detector for end point of ashing |
JPS62165934A (en) * | 1986-01-17 | 1987-07-22 | Tokyo Electron Ltd | Detecting method for end point of ashing |
JP2012012241A (en) * | 2010-06-30 | 2012-01-19 | Mitsubishi Materials Corp | Production method and apparatus in which corrosive gas such as ruthenium tetroxide generates |
-
1977
- 1977-08-17 JP JP9788977A patent/JPS5432069A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165935A (en) * | 1986-01-17 | 1987-07-22 | Tokyo Electron Ltd | Detector for end point of ashing |
JPS62165934A (en) * | 1986-01-17 | 1987-07-22 | Tokyo Electron Ltd | Detecting method for end point of ashing |
JP2012012241A (en) * | 2010-06-30 | 2012-01-19 | Mitsubishi Materials Corp | Production method and apparatus in which corrosive gas such as ruthenium tetroxide generates |
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