JPS542072A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS542072A
JPS542072A JP6626677A JP6626677A JPS542072A JP S542072 A JPS542072 A JP S542072A JP 6626677 A JP6626677 A JP 6626677A JP 6626677 A JP6626677 A JP 6626677A JP S542072 A JPS542072 A JP S542072A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
photo
substrate
taking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6626677A
Other languages
Japanese (ja)
Inventor
Takao Hashimoto
Masayoshi Ino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP6626677A priority Critical patent/JPS542072A/en
Publication of JPS542072A publication Critical patent/JPS542072A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain excellent photo copy image on the transparent film on the transparent substrate on the surface of a substrate chuck stand by taking it as material of photo absorption.
COPYRIGHT: (C)1979,JPO&Japio
JP6626677A 1977-06-07 1977-06-07 Manufacture for semiconductor device Pending JPS542072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6626677A JPS542072A (en) 1977-06-07 1977-06-07 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6626677A JPS542072A (en) 1977-06-07 1977-06-07 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS542072A true JPS542072A (en) 1979-01-09

Family

ID=13310861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6626677A Pending JPS542072A (en) 1977-06-07 1977-06-07 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS542072A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115827A (en) * 1974-02-22 1975-09-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115827A (en) * 1974-02-22 1975-09-10

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