JPS541897A - Humidity detector element - Google Patents
Humidity detector elementInfo
- Publication number
- JPS541897A JPS541897A JP6700477A JP6700477A JPS541897A JP S541897 A JPS541897 A JP S541897A JP 6700477 A JP6700477 A JP 6700477A JP 6700477 A JP6700477 A JP 6700477A JP S541897 A JPS541897 A JP S541897A
- Authority
- JP
- Japan
- Prior art keywords
- detector element
- humidity detector
- construct
- base unit
- high precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Insulating Materials (AREA)
Abstract
PURPOSE: To construct a humidity detector element, small in size, with a high precision and quick response, by successively layer building dielectric anodized film, semiconductor metal oxide film and opposite electrode on a base unit consisting of valve action metal or Si, Ge.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6700477A JPS6020841B2 (en) | 1977-06-06 | 1977-06-06 | Humidity detection element |
AU36668/78A AU501488B1 (en) | 1977-06-06 | 1978-05-30 | Humidity sensor |
DE2824609A DE2824609C2 (en) | 1977-06-06 | 1978-06-05 | Device for measuring humidity by changing electrostatic capacitance |
US05/912,714 US4217623A (en) | 1977-06-06 | 1978-06-05 | Humidity sensor of capacitance change type |
CA304,798A CA1116237A (en) | 1977-06-06 | 1978-06-05 | Humidity sensor of capacitance change type |
GB7826328A GB2000292B (en) | 1977-06-06 | 1978-06-05 | Humidity sensor of capacitance change type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6700477A JPS6020841B2 (en) | 1977-06-06 | 1977-06-06 | Humidity detection element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS541897A true JPS541897A (en) | 1979-01-09 |
JPS6020841B2 JPS6020841B2 (en) | 1985-05-24 |
Family
ID=13332339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6700477A Expired JPS6020841B2 (en) | 1977-06-06 | 1977-06-06 | Humidity detection element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6020841B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5778104A (en) * | 1980-06-27 | 1982-05-15 | Endress Hauser Gmbh Co | Moisture sensor and method of producing same |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0417061Y2 (en) * | 1985-05-01 | 1992-04-16 |
-
1977
- 1977-06-06 JP JP6700477A patent/JPS6020841B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5778104A (en) * | 1980-06-27 | 1982-05-15 | Endress Hauser Gmbh Co | Moisture sensor and method of producing same |
JPH0122961B2 (en) * | 1980-06-27 | 1989-04-28 | Endress Hauser Gmbh Co |
Also Published As
Publication number | Publication date |
---|---|
JPS6020841B2 (en) | 1985-05-24 |
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