JPS541897A - Humidity detector element - Google Patents

Humidity detector element

Info

Publication number
JPS541897A
JPS541897A JP6700477A JP6700477A JPS541897A JP S541897 A JPS541897 A JP S541897A JP 6700477 A JP6700477 A JP 6700477A JP 6700477 A JP6700477 A JP 6700477A JP S541897 A JPS541897 A JP S541897A
Authority
JP
Japan
Prior art keywords
detector element
humidity detector
construct
base unit
high precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6700477A
Other languages
Japanese (ja)
Other versions
JPS6020841B2 (en
Inventor
Akihiko Yoshida
Atsushi Nishino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6700477A priority Critical patent/JPS6020841B2/en
Priority to AU36668/78A priority patent/AU501488B1/en
Priority to DE2824609A priority patent/DE2824609C2/en
Priority to US05/912,714 priority patent/US4217623A/en
Priority to CA304,798A priority patent/CA1116237A/en
Priority to GB7826328A priority patent/GB2000292B/en
Publication of JPS541897A publication Critical patent/JPS541897A/en
Publication of JPS6020841B2 publication Critical patent/JPS6020841B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To construct a humidity detector element, small in size, with a high precision and quick response, by successively layer building dielectric anodized film, semiconductor metal oxide film and opposite electrode on a base unit consisting of valve action metal or Si, Ge.
COPYRIGHT: (C)1979,JPO&Japio
JP6700477A 1977-06-06 1977-06-06 Humidity detection element Expired JPS6020841B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP6700477A JPS6020841B2 (en) 1977-06-06 1977-06-06 Humidity detection element
AU36668/78A AU501488B1 (en) 1977-06-06 1978-05-30 Humidity sensor
DE2824609A DE2824609C2 (en) 1977-06-06 1978-06-05 Device for measuring humidity by changing electrostatic capacitance
US05/912,714 US4217623A (en) 1977-06-06 1978-06-05 Humidity sensor of capacitance change type
CA304,798A CA1116237A (en) 1977-06-06 1978-06-05 Humidity sensor of capacitance change type
GB7826328A GB2000292B (en) 1977-06-06 1978-06-05 Humidity sensor of capacitance change type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6700477A JPS6020841B2 (en) 1977-06-06 1977-06-06 Humidity detection element

Publications (2)

Publication Number Publication Date
JPS541897A true JPS541897A (en) 1979-01-09
JPS6020841B2 JPS6020841B2 (en) 1985-05-24

Family

ID=13332339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6700477A Expired JPS6020841B2 (en) 1977-06-06 1977-06-06 Humidity detection element

Country Status (1)

Country Link
JP (1) JPS6020841B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778104A (en) * 1980-06-27 1982-05-15 Endress Hauser Gmbh Co Moisture sensor and method of producing same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0417061Y2 (en) * 1985-05-01 1992-04-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778104A (en) * 1980-06-27 1982-05-15 Endress Hauser Gmbh Co Moisture sensor and method of producing same
JPH0122961B2 (en) * 1980-06-27 1989-04-28 Endress Hauser Gmbh Co

Also Published As

Publication number Publication date
JPS6020841B2 (en) 1985-05-24

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