JPS51150095A - Thin film resistor - Google Patents

Thin film resistor

Info

Publication number
JPS51150095A
JPS51150095A JP50075160A JP7516075A JPS51150095A JP S51150095 A JPS51150095 A JP S51150095A JP 50075160 A JP50075160 A JP 50075160A JP 7516075 A JP7516075 A JP 7516075A JP S51150095 A JPS51150095 A JP S51150095A
Authority
JP
Japan
Prior art keywords
thin film
film resistor
resistance
metalic
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50075160A
Other languages
Japanese (ja)
Other versions
JPS5550364B2 (en
Inventor
Takeshi Nagai
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50075160A priority Critical patent/JPS51150095A/en
Publication of JPS51150095A publication Critical patent/JPS51150095A/en
Publication of JPS5550364B2 publication Critical patent/JPS5550364B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: Thin film resistor in which area resistance is great and resistance temperature coefficient is small, composed of metalic nitride and the metal.
COPYRIGHT: (C)1976,JPO&Japio
JP50075160A 1975-06-19 1975-06-19 Thin film resistor Granted JPS51150095A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50075160A JPS51150095A (en) 1975-06-19 1975-06-19 Thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50075160A JPS51150095A (en) 1975-06-19 1975-06-19 Thin film resistor

Publications (2)

Publication Number Publication Date
JPS51150095A true JPS51150095A (en) 1976-12-23
JPS5550364B2 JPS5550364B2 (en) 1980-12-17

Family

ID=13568163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50075160A Granted JPS51150095A (en) 1975-06-19 1975-06-19 Thin film resistor

Country Status (1)

Country Link
JP (1) JPS51150095A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62170847U (en) * 1986-04-21 1987-10-29
JPH07158681A (en) * 1993-12-02 1995-06-20 Musashi Seimitsu Ind Co Ltd Shock absorber

Also Published As

Publication number Publication date
JPS5550364B2 (en) 1980-12-17

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