JPS523197A - Thin film resistor - Google Patents

Thin film resistor

Info

Publication number
JPS523197A
JPS523197A JP50079525A JP7952575A JPS523197A JP S523197 A JPS523197 A JP S523197A JP 50079525 A JP50079525 A JP 50079525A JP 7952575 A JP7952575 A JP 7952575A JP S523197 A JPS523197 A JP S523197A
Authority
JP
Japan
Prior art keywords
thin film
film resistor
temperatureresistance
50ppm
wide range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50079525A
Other languages
Japanese (ja)
Inventor
Takeshi Nagai
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50079525A priority Critical patent/JPS523197A/en
Publication of JPS523197A publication Critical patent/JPS523197A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: A thin film nitride resistor having less than 50ppm/°C of temperatureresistance coefficient TCR in a wide range of area resistivity.
COPYRIGHT: (C)1977,JPO&Japio
JP50079525A 1975-06-24 1975-06-24 Thin film resistor Pending JPS523197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50079525A JPS523197A (en) 1975-06-24 1975-06-24 Thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50079525A JPS523197A (en) 1975-06-24 1975-06-24 Thin film resistor

Publications (1)

Publication Number Publication Date
JPS523197A true JPS523197A (en) 1977-01-11

Family

ID=13692388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50079525A Pending JPS523197A (en) 1975-06-24 1975-06-24 Thin film resistor

Country Status (1)

Country Link
JP (1) JPS523197A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5142748A (en) * 1974-10-11 1976-04-12 Toray Industries NETSUSETSUCHAKUSEIHORIESUTERUFUIRUMU

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5142748A (en) * 1974-10-11 1976-04-12 Toray Industries NETSUSETSUCHAKUSEIHORIESUTERUFUIRUMU

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