JPS54160175A - Etching device - Google Patents

Etching device

Info

Publication number
JPS54160175A
JPS54160175A JP6953078A JP6953078A JPS54160175A JP S54160175 A JPS54160175 A JP S54160175A JP 6953078 A JP6953078 A JP 6953078A JP 6953078 A JP6953078 A JP 6953078A JP S54160175 A JPS54160175 A JP S54160175A
Authority
JP
Japan
Prior art keywords
etching
substrate
time
output
completion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6953078A
Other languages
English (en)
Inventor
Mitsusada Shibasaka
Hiroaki Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6953078A priority Critical patent/JPS54160175A/ja
Publication of JPS54160175A publication Critical patent/JPS54160175A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP6953078A 1978-06-09 1978-06-09 Etching device Pending JPS54160175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6953078A JPS54160175A (en) 1978-06-09 1978-06-09 Etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6953078A JPS54160175A (en) 1978-06-09 1978-06-09 Etching device

Publications (1)

Publication Number Publication Date
JPS54160175A true JPS54160175A (en) 1979-12-18

Family

ID=13405360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6953078A Pending JPS54160175A (en) 1978-06-09 1978-06-09 Etching device

Country Status (1)

Country Link
JP (1) JPS54160175A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019062007A (ja) * 2017-09-25 2019-04-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019062007A (ja) * 2017-09-25 2019-04-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

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