JPS54158294A - Mass analyzer of neutral sputter particles - Google Patents

Mass analyzer of neutral sputter particles

Info

Publication number
JPS54158294A
JPS54158294A JP6677178A JP6677178A JPS54158294A JP S54158294 A JPS54158294 A JP S54158294A JP 6677178 A JP6677178 A JP 6677178A JP 6677178 A JP6677178 A JP 6677178A JP S54158294 A JPS54158294 A JP S54158294A
Authority
JP
Japan
Prior art keywords
tube
plasma
potential
mass analyzer
microwaves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6677178A
Other languages
English (en)
Other versions
JPS5836818B2 (ja
Inventor
Toru Ishitani
Hifumi Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP53066771A priority Critical patent/JPS5836818B2/ja
Publication of JPS54158294A publication Critical patent/JPS54158294A/ja
Publication of JPS5836818B2 publication Critical patent/JPS5836818B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
JP53066771A 1978-06-05 1978-06-05 スパッタ中性粒子質量分析計 Expired JPS5836818B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53066771A JPS5836818B2 (ja) 1978-06-05 1978-06-05 スパッタ中性粒子質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53066771A JPS5836818B2 (ja) 1978-06-05 1978-06-05 スパッタ中性粒子質量分析計

Publications (2)

Publication Number Publication Date
JPS54158294A true JPS54158294A (en) 1979-12-13
JPS5836818B2 JPS5836818B2 (ja) 1983-08-11

Family

ID=13325460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53066771A Expired JPS5836818B2 (ja) 1978-06-05 1978-06-05 スパッタ中性粒子質量分析計

Country Status (1)

Country Link
JP (1) JPS5836818B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63298939A (ja) * 1987-05-29 1988-12-06 Nippon Telegr & Teleph Corp <Ntt> スパッタ型イオン源
JPS63304560A (ja) * 1987-06-05 1988-12-12 Rikagaku Kenkyusho スパッタ中性粒子質量分析装置
JPS6431336A (en) * 1987-07-27 1989-02-01 Nippon Telegraph & Telephone Ion source
JPH01272043A (ja) * 1988-04-22 1989-10-31 Hitachi Ltd スパッタ中性粒子のイオン化方法およびその装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63298939A (ja) * 1987-05-29 1988-12-06 Nippon Telegr & Teleph Corp <Ntt> スパッタ型イオン源
JPS63304560A (ja) * 1987-06-05 1988-12-12 Rikagaku Kenkyusho スパッタ中性粒子質量分析装置
JPS6431336A (en) * 1987-07-27 1989-02-01 Nippon Telegraph & Telephone Ion source
JPH01272043A (ja) * 1988-04-22 1989-10-31 Hitachi Ltd スパッタ中性粒子のイオン化方法およびその装置

Also Published As

Publication number Publication date
JPS5836818B2 (ja) 1983-08-11

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