JPS54153577A - Photoresist separator containing no phenol and chlorinated hydrocarbon - Google Patents

Photoresist separator containing no phenol and chlorinated hydrocarbon

Info

Publication number
JPS54153577A
JPS54153577A JP6315579A JP6315579A JPS54153577A JP S54153577 A JPS54153577 A JP S54153577A JP 6315579 A JP6315579 A JP 6315579A JP 6315579 A JP6315579 A JP 6315579A JP S54153577 A JPS54153577 A JP S54153577A
Authority
JP
Japan
Prior art keywords
photoresist
phenol
chlorinated hydrocarbon
separator containing
separator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6315579A
Other languages
English (en)
Other versions
JPH0253781B2 (ja
Inventor
Edowaado Bandaa Mei Jiyon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Allied Corp
Original Assignee
Allied Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/908,189 external-priority patent/US4165294A/en
Application filed by Allied Chemical Corp filed Critical Allied Chemical Corp
Publication of JPS54153577A publication Critical patent/JPS54153577A/ja
Publication of JPH0253781B2 publication Critical patent/JPH0253781B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
    • C11D1/22—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aromatic compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/34—Organic compounds containing sulfur
    • C11D3/3418—Toluene -, xylene -, cumene -, benzene - or naphthalene sulfonates or sulfates
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP6315579A 1978-05-22 1979-05-22 Photoresist separator containing no phenol and chlorinated hydrocarbon Granted JPS54153577A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/908,189 US4165294A (en) 1976-11-08 1978-05-22 Phenol-free and chlorinated hydrocarbon-free photoresist stripper comprising surfactant and hydrotropic aromatic sulfonic acids

Publications (2)

Publication Number Publication Date
JPS54153577A true JPS54153577A (en) 1979-12-03
JPH0253781B2 JPH0253781B2 (ja) 1990-11-19

Family

ID=25425341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6315579A Granted JPS54153577A (en) 1978-05-22 1979-05-22 Photoresist separator containing no phenol and chlorinated hydrocarbon

Country Status (6)

Country Link
JP (1) JPS54153577A (ja)
CA (1) CA1116059A (ja)
DE (1) DE2919666A1 (ja)
FR (1) FR2426926B1 (ja)
GB (1) GB2021285B (ja)
IT (1) IT1165205B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225523A (ja) * 1983-05-20 1984-12-18 エッチエムシー・パテンツ・ホールディング・カンパニー・インコーポレーテッド かつ色汚染抑制性フエノ−ル不含および塩素化炭化水素不含フオトレジストストリツパ−
JP2013540171A (ja) * 2010-09-27 2013-10-31 イーストマン ケミカル カンパニー 基材から物質を除去するための方法および組成物

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1217690A (en) * 1983-07-07 1987-02-10 Clement K. Choy Hard surface acid cleaner
US4759867A (en) * 1983-07-07 1988-07-26 The Clorox Company Hard surface acid cleaner
US6943142B2 (en) * 2002-01-09 2005-09-13 Air Products And Chemicals, Inc. Aqueous stripping and cleaning composition
CN107406697B (zh) 2015-03-12 2021-02-09 默克专利有限公司 在低pka驱动的聚合物剥离过程中促进电荷络合铜保护的组合物和方法
CN114080571A (zh) 2019-07-11 2022-02-22 默克专利股份有限公司 光致抗蚀剂去除剂组合物

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5172503A (en) * 1974-11-16 1976-06-23 Merck Patent Gmbh Fuotoratsukaajokyozai
JPS5220101A (en) * 1975-08-01 1977-02-15 Allied Chem Phenollless photooresist peeling agent

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5172503A (en) * 1974-11-16 1976-06-23 Merck Patent Gmbh Fuotoratsukaajokyozai
JPS5220101A (en) * 1975-08-01 1977-02-15 Allied Chem Phenollless photooresist peeling agent

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225523A (ja) * 1983-05-20 1984-12-18 エッチエムシー・パテンツ・ホールディング・カンパニー・インコーポレーテッド かつ色汚染抑制性フエノ−ル不含および塩素化炭化水素不含フオトレジストストリツパ−
JPH0469779B2 (ja) * 1983-05-20 1992-11-09 Etsuchi Emu Shii Patentsu Hoorudeingu Co Inc
JP2013540171A (ja) * 2010-09-27 2013-10-31 イーストマン ケミカル カンパニー 基材から物質を除去するための方法および組成物

Also Published As

Publication number Publication date
CA1116059A (en) 1982-01-12
GB2021285B (en) 1982-09-29
IT1165205B (it) 1987-04-22
GB2021285A (en) 1979-11-28
FR2426926B1 (fr) 1986-11-07
FR2426926A1 (fr) 1979-12-21
DE2919666C2 (ja) 1987-09-10
DE2919666A1 (de) 1979-11-29
IT7968069A0 (it) 1979-05-21
JPH0253781B2 (ja) 1990-11-19

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