IT7968069A0 - Agente di distacco di fotoresistprivo di fenolo e privo di idrocarburi clorurati - Google Patents

Agente di distacco di fotoresistprivo di fenolo e privo di idrocarburi clorurati

Info

Publication number
IT7968069A0
IT7968069A0 IT7968069A IT6806979A IT7968069A0 IT 7968069 A0 IT7968069 A0 IT 7968069A0 IT 7968069 A IT7968069 A IT 7968069A IT 6806979 A IT6806979 A IT 6806979A IT 7968069 A0 IT7968069 A0 IT 7968069A0
Authority
IT
Italy
Prior art keywords
free
release agent
chlorinated hydrocarbons
photoresist release
agent phenol
Prior art date
Application number
IT7968069A
Other languages
English (en)
Other versions
IT1165205B (it
Original Assignee
Allied Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/908,189 external-priority patent/US4165294A/en
Application filed by Allied Chem filed Critical Allied Chem
Publication of IT7968069A0 publication Critical patent/IT7968069A0/it
Application granted granted Critical
Publication of IT1165205B publication Critical patent/IT1165205B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
    • C11D1/22—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aromatic compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/34—Organic compounds containing sulfur
    • C11D3/3418—Toluene -, xylene -, cumene -, benzene - or naphthalene sulfonates or sulfates
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
IT68069/79A 1978-05-22 1979-05-21 Agente di distacco di fotoresistprivo di fenolo e privo di idrocarburi clorurati IT1165205B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/908,189 US4165294A (en) 1976-11-08 1978-05-22 Phenol-free and chlorinated hydrocarbon-free photoresist stripper comprising surfactant and hydrotropic aromatic sulfonic acids

Publications (2)

Publication Number Publication Date
IT7968069A0 true IT7968069A0 (it) 1979-05-21
IT1165205B IT1165205B (it) 1987-04-22

Family

ID=25425341

Family Applications (1)

Application Number Title Priority Date Filing Date
IT68069/79A IT1165205B (it) 1978-05-22 1979-05-21 Agente di distacco di fotoresistprivo di fenolo e privo di idrocarburi clorurati

Country Status (6)

Country Link
JP (1) JPS54153577A (it)
CA (1) CA1116059A (it)
DE (1) DE2919666A1 (it)
FR (1) FR2426926B1 (it)
GB (1) GB2021285B (it)
IT (1) IT1165205B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4491530A (en) * 1983-05-20 1985-01-01 Allied Corporation Brown stain suppressing phenol free and chlorinated hydrocarbons free photoresist stripper
CA1217690A (en) * 1983-07-07 1987-02-10 Clement K. Choy Hard surface acid cleaner
US4759867A (en) * 1983-07-07 1988-07-26 The Clorox Company Hard surface acid cleaner
US6943142B2 (en) * 2002-01-09 2005-09-13 Air Products And Chemicals, Inc. Aqueous stripping and cleaning composition
US8614053B2 (en) * 2009-03-27 2013-12-24 Eastman Chemical Company Processess and compositions for removing substances from substrates
CN107406697B (zh) 2015-03-12 2021-02-09 默克专利有限公司 在低pka驱动的聚合物剥离过程中促进电荷络合铜保护的组合物和方法
CN114080571A (zh) 2019-07-11 2022-02-22 默克专利股份有限公司 光致抗蚀剂去除剂组合物

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2454399C2 (de) * 1974-11-16 1981-09-24 Merck Patent Gmbh, 6100 Darmstadt Ablösemittel für Fotolacke
IT1125196B (it) * 1975-08-01 1986-05-14 Allied Chem Disassorbitore fotoresistivo privo di fenolo

Also Published As

Publication number Publication date
CA1116059A (en) 1982-01-12
GB2021285B (en) 1982-09-29
JPS54153577A (en) 1979-12-03
IT1165205B (it) 1987-04-22
GB2021285A (en) 1979-11-28
FR2426926B1 (fr) 1986-11-07
FR2426926A1 (fr) 1979-12-21
DE2919666C2 (it) 1987-09-10
DE2919666A1 (de) 1979-11-29
JPH0253781B2 (it) 1990-11-19

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