FR2426926B1 - Compositions a base d'acide alkylarylsulfonique, d'acide sulfonique aromatique et de solvant hydrocarbone aromatique exempt d'halogene pour l'enlevement de produits photoresistants a partir de substrats mineraux - Google Patents
Compositions a base d'acide alkylarylsulfonique, d'acide sulfonique aromatique et de solvant hydrocarbone aromatique exempt d'halogene pour l'enlevement de produits photoresistants a partir de substrats minerauxInfo
- Publication number
- FR2426926B1 FR2426926B1 FR7911757A FR7911757A FR2426926B1 FR 2426926 B1 FR2426926 B1 FR 2426926B1 FR 7911757 A FR7911757 A FR 7911757A FR 7911757 A FR7911757 A FR 7911757A FR 2426926 B1 FR2426926 B1 FR 2426926B1
- Authority
- FR
- France
- Prior art keywords
- photoresistent
- halogen
- removal
- products
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 title 1
- 239000002253 acid Substances 0.000 title 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 title 1
- 229910052500 inorganic mineral Inorganic materials 0.000 title 1
- 239000011707 mineral Substances 0.000 title 1
- 239000000203 mixture Substances 0.000 title 1
- 239000002904 solvent Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/22—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aromatic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/34—Organic compounds containing sulfur
- C11D3/3418—Toluene -, xylene -, cumene -, benzene - or naphthalene sulfonates or sulfates
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/908,189 US4165294A (en) | 1976-11-08 | 1978-05-22 | Phenol-free and chlorinated hydrocarbon-free photoresist stripper comprising surfactant and hydrotropic aromatic sulfonic acids |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2426926A1 FR2426926A1 (fr) | 1979-12-21 |
FR2426926B1 true FR2426926B1 (fr) | 1986-11-07 |
Family
ID=25425341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7911757A Expired FR2426926B1 (fr) | 1978-05-22 | 1979-05-09 | Compositions a base d'acide alkylarylsulfonique, d'acide sulfonique aromatique et de solvant hydrocarbone aromatique exempt d'halogene pour l'enlevement de produits photoresistants a partir de substrats mineraux |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS54153577A (fr) |
CA (1) | CA1116059A (fr) |
DE (1) | DE2919666A1 (fr) |
FR (1) | FR2426926B1 (fr) |
GB (1) | GB2021285B (fr) |
IT (1) | IT1165205B (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4491530A (en) * | 1983-05-20 | 1985-01-01 | Allied Corporation | Brown stain suppressing phenol free and chlorinated hydrocarbons free photoresist stripper |
US4759867A (en) * | 1983-07-07 | 1988-07-26 | The Clorox Company | Hard surface acid cleaner |
CA1217690A (fr) * | 1983-07-07 | 1987-02-10 | Clement K. Choy | Nettoyant acide pour surfaces dures |
US6943142B2 (en) * | 2002-01-09 | 2005-09-13 | Air Products And Chemicals, Inc. | Aqueous stripping and cleaning composition |
US8614053B2 (en) * | 2009-03-27 | 2013-12-24 | Eastman Chemical Company | Processess and compositions for removing substances from substrates |
CN107406697B (zh) * | 2015-03-12 | 2021-02-09 | 默克专利有限公司 | 在低pka驱动的聚合物剥离过程中促进电荷络合铜保护的组合物和方法 |
CN114080571A (zh) | 2019-07-11 | 2022-02-22 | 默克专利股份有限公司 | 光致抗蚀剂去除剂组合物 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2454399C2 (de) * | 1974-11-16 | 1981-09-24 | Merck Patent Gmbh, 6100 Darmstadt | Ablösemittel für Fotolacke |
IT1125196B (it) * | 1975-08-01 | 1986-05-14 | Allied Chem | Disassorbitore fotoresistivo privo di fenolo |
-
1979
- 1979-04-27 CA CA326,518A patent/CA1116059A/fr not_active Expired
- 1979-05-09 FR FR7911757A patent/FR2426926B1/fr not_active Expired
- 1979-05-16 DE DE19792919666 patent/DE2919666A1/de active Granted
- 1979-05-21 IT IT68069/79A patent/IT1165205B/it active
- 1979-05-21 GB GB7917616A patent/GB2021285B/en not_active Expired
- 1979-05-22 JP JP6315579A patent/JPS54153577A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS54153577A (en) | 1979-12-03 |
GB2021285A (en) | 1979-11-28 |
CA1116059A (fr) | 1982-01-12 |
FR2426926A1 (fr) | 1979-12-21 |
JPH0253781B2 (fr) | 1990-11-19 |
DE2919666A1 (de) | 1979-11-29 |
IT1165205B (it) | 1987-04-22 |
IT7968069A0 (it) | 1979-05-21 |
DE2919666C2 (fr) | 1987-09-10 |
GB2021285B (en) | 1982-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CD | Change of name or company name | ||
TP | Transmission of property | ||
ST | Notification of lapse |