JPS54153545A - Surface acoustic wave device element - Google Patents

Surface acoustic wave device element

Info

Publication number
JPS54153545A
JPS54153545A JP6266978A JP6266978A JPS54153545A JP S54153545 A JPS54153545 A JP S54153545A JP 6266978 A JP6266978 A JP 6266978A JP 6266978 A JP6266978 A JP 6266978A JP S54153545 A JPS54153545 A JP S54153545A
Authority
JP
Japan
Prior art keywords
device element
surface acoustic
conductive layer
acoustic wave
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6266978A
Other languages
Japanese (ja)
Inventor
Katsuaki Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6266978A priority Critical patent/JPS54153545A/en
Publication of JPS54153545A publication Critical patent/JPS54153545A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To establish the surface acoustic device element excellent in the high frequency performance with low cost. CONSTITUTION:The crossing comb type electrode 22 is formed on the piezoelectric substrate 2 with Al, and the SiO2 film 23 is formed on it as the insulation film, and further, the conductive layer 24 made of Al is formed. Next, after forming holes 25 to perform wire-bonding on the input and output terminals and ground terminals of the transducer with photo etching method, the part on the comb type electrode of the conductive layer 24 is removed. After that, the wire bonding is made with Al or the like, and the device element is sealed with mold resin.
JP6266978A 1978-05-24 1978-05-24 Surface acoustic wave device element Pending JPS54153545A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6266978A JPS54153545A (en) 1978-05-24 1978-05-24 Surface acoustic wave device element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6266978A JPS54153545A (en) 1978-05-24 1978-05-24 Surface acoustic wave device element

Publications (1)

Publication Number Publication Date
JPS54153545A true JPS54153545A (en) 1979-12-03

Family

ID=13206923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6266978A Pending JPS54153545A (en) 1978-05-24 1978-05-24 Surface acoustic wave device element

Country Status (1)

Country Link
JP (1) JPS54153545A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5408731A (en) * 1992-11-05 1995-04-25 Csem Centre Suisse D'electronique Et De Microtechnique S.A. - Rechere Et Developpement Process for the manufacture of integrated capacitive transducers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5408731A (en) * 1992-11-05 1995-04-25 Csem Centre Suisse D'electronique Et De Microtechnique S.A. - Rechere Et Developpement Process for the manufacture of integrated capacitive transducers

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