JPS6217404B2 - - Google Patents
Info
- Publication number
- JPS6217404B2 JPS6217404B2 JP8648578A JP8648578A JPS6217404B2 JP S6217404 B2 JPS6217404 B2 JP S6217404B2 JP 8648578 A JP8648578 A JP 8648578A JP 8648578 A JP8648578 A JP 8648578A JP S6217404 B2 JPS6217404 B2 JP S6217404B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- elastic material
- wave device
- piezoelectric ceramic
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 18
- 239000013013 elastic material Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 229920002379 silicone rubber Polymers 0.000 claims description 3
- 239000004944 Liquid Silicone Rubber Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Description
【発明の詳細な説明】
本発明は圧電磁器波器の製造法に関するもの
で、前記圧電磁器波器の共振部分周辺に空間を
形成することによつて本来の圧電磁器波器の性
能を維持向上せしめるときに用いて好適な製造法
を提供しようとするものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a piezoelectric ceramic wave device, and maintains and improves the original performance of the piezoelectric ceramic wave device by forming a space around the resonant part of the piezoelectric ceramic wave device. The purpose of the present invention is to provide a manufacturing method that is suitable for use when manufacturing.
一般に圧電磁器波器は圧電素子本来の性能を
維持向上できる製品構造が必要である。たとえ
ば、波器としての機能を構成する共振部に外部
からの加圧等のストレスが加わると、波特性は
低下し、本来の圧電磁器波器としての機能は低
下あるいは全く消滅してしまう。このために、圧
電磁器波器の共振部周辺にそつて空間を形成
し、共振部分への外部からの加圧等のストレスが
加わるのを防止する技術が提案されている。 In general, piezoelectric ceramic wave devices require a product structure that can maintain and improve the inherent performance of the piezoelectric element. For example, if stress such as external pressure is applied to the resonant portion that functions as a wave device, the wave characteristics will deteriorate, and the original function as a piezoelectric wave device will deteriorate or disappear altogether. To this end, a technique has been proposed in which a space is formed around the resonant part of the piezoelectric ceramic wave device to prevent stress such as external pressure from being applied to the resonant part.
第１図に上記空間を形成するための従来の方法
を示す。まず、圧電磁器波器の基本構造につい
て説明すると、絶縁基板１上に適当な間隔をおい
て１対の導電部２，２′を形成し、この導電部
２，２′におのおの引出しリード３，３′を一体化
するとともに、前記導電部２，２′間に、上下面
に電極４，４′を設けた略矩形状の圧電素子５を
半田もしくは導電性接着剤６，６′によつて固定
して成る。 FIG. 1 shows a conventional method for forming the above-mentioned space. First, to explain the basic structure of a piezoelectric ceramic wave device, a pair of conductive parts 2, 2' are formed on an insulating substrate 1 at an appropriate interval, and each lead 3, 3', and a substantially rectangular piezoelectric element 5 having electrodes 4, 4' on the upper and lower surfaces is attached between the conductive parts 2, 2' by soldering or conductive adhesive 6, 6'. It is fixed.
この後、圧電素子５を固定した絶縁基板１の上
下に熱可塑性テープ７，７′を配置し、絶縁基板
１の外周にそつてテープ７，７′を圧着加熱して
封止することにより、圧電素子５の周辺に空間を
形成していた。 After that, thermoplastic tapes 7 and 7' are placed above and below the insulating substrate 1 on which the piezoelectric element 5 is fixed, and the tapes 7 and 7' are pressed and heated along the outer periphery of the insulating substrate 1 for sealing. A space was formed around the piezoelectric element 5.
しかるに上記従来の構成ではテープを用いるた
め、保護効果は低く、また、テープを圧電磁器
波器の上下に配置して封着するため、生産性が悪
く、実用的でないという問題があつた。 However, since the above-mentioned conventional structure uses tape, the protective effect is low, and since the tape is placed above and below the piezoelectric ceramic waver for sealing, there are problems in that productivity is poor and it is not practical.
本発明は上記従来の欠点を除去するものであ
る。以下その一実施例について第２図を用いて説
明する。圧電磁器波器の基本構造は第１図と同
様で、引出しリード３，３′を一体化した絶縁基
板１上の導電部２，２′間に、電極４，４′を有す
る圧電素子５を固定してなる。本実施例では、こ
の圧電素子５の周辺全域を引出しリード３，３′
のみを残してシリコンゴム等の粘性を有する弾性
材料の液中に浸漬した後取外し、第２図に示すよ
うに、注射器の針のように先端が鋭角な形状をな
すノズル８を弾性材料９に差し込んでその先端を
圧電素子５に近接せしめ、前記ノズル８を介して
外部からの空気圧によつて圧電素子５の周辺の弾
性材料９を排除することにより、圧電素子５の周
辺に空間１０を形成する。この後、ノズル８を抜
き出すとともに、弾性材料９を硬化せしめること
により完成品となる。 The present invention eliminates the above-mentioned conventional drawbacks. An example of this will be described below with reference to FIG. 2. The basic structure of the piezoelectric ceramic wave device is the same as that shown in Fig. 1, in which a piezoelectric element 5 having electrodes 4, 4' is placed between conductive parts 2, 2' on an insulating substrate 1 with integrated lead leads 3, 3'. It becomes fixed. In this embodiment, the entire area around the piezoelectric element 5 is extended to lead leads 3, 3'.
The nozzle 8, which has an acute tip like the needle of a syringe, is inserted into the elastic material 9 as shown in Fig. 2. A space 10 is formed around the piezoelectric element 5 by inserting it, bringing its tip close to the piezoelectric element 5, and removing the elastic material 9 around the piezoelectric element 5 by air pressure from the outside through the nozzle 8. do. Thereafter, the nozzle 8 is extracted and the elastic material 9 is hardened to form a finished product.
以上のように本方法によれば、シリコンゴム等
の弾性材料中に圧電磁器波器を浸漬した後取出
し、ノズルを圧電素子の近辺まで挿入し、ノズル
を介して空気圧を加えることによつて圧電素子周
辺の弾性材料を排除して空間を形成することによ
り、同時に、圧電磁器波器の外装および保護を
はかることができる。第３図に本発明の方法によ
り得られた圧電磁器波器の波特性および空間
を何ら形成しない場合の波特性を比較して示
す。Ａが本発明により得られた特性、Ｂが空間を
形成しない場合の特性であるが、本発明品によれ
ば挿入損失が小さく、急峻な周波数応答出力が得
られるものである。 As described above, according to this method, a piezoelectric ceramic waver is immersed in an elastic material such as silicone rubber, taken out, a nozzle is inserted close to the piezoelectric element, and air pressure is applied through the nozzle to generate a piezoelectric wave. By eliminating the elastic material around the element to form a space, the piezoelectric ceramic wave device can be packaged and protected at the same time. FIG. 3 shows a comparison of the wave characteristics of the piezoelectric ceramic wave device obtained by the method of the present invention and the wave characteristics when no space is formed. A is the characteristic obtained by the present invention, and B is the characteristic when no space is formed. According to the product of the present invention, insertion loss is small and a steep frequency response output can be obtained.
以上説明したように本発明によれば、シリコン
ゴム等への浸漬法により容易に空間を形成するこ
とができ、圧電素子を外部からの加圧等より確実
に保護することができるとともに、特性の良好な
圧電磁器波器を得ることができる。また、圧電
素子部分を覆う作業も圧電磁器波器を弾性材料
中に浸漬するだけでよいため作業性が良い。 As explained above, according to the present invention, a space can be easily formed by dipping into silicone rubber, etc., the piezoelectric element can be reliably protected from external pressure, etc., and the characteristics can be improved. A good piezoelectric ceramic wave device can be obtained. Further, the work of covering the piezoelectric element portion is easy because it is only necessary to immerse the piezoelectric ceramic waver in an elastic material.
第１図イ，ロは従来の圧電磁器波器の平面透
視図、断面図、第２図イは本発明による圧電磁器
波器の製造法を説明するための透視図、第２図
ロは本発明により空間が形成されたところの圧電
磁器波器の断面図、第３図は本発明により得ら
れた波器と空間を形成しない波器の特性を比
較して示す図である。
１……絶縁基板、２，２′……導電部、３，
３′……引出しリード、４，４′……電極、５……
圧電素子、８……ノズル、９……弾性材料。
Figures 1A and 2B are a plan perspective view and a cross-sectional view of a conventional piezoelectric ceramic wave device, Figure 2A is a perspective view for explaining the method of manufacturing a piezoelectric ceramic wave device according to the present invention, and Figure 2B is a main view of the present invention. FIG. 3 is a sectional view of a piezoelectric ceramic wave device in which a space is formed according to the present invention, and is a diagram showing a comparison of the characteristics of a wave device obtained according to the present invention and a wave device in which no space is formed. 1... Insulating substrate, 2, 2'... Conductive part, 3,
3'...Output lead, 4,4'...Electrode, 5...
Piezoelectric element, 8... Nozzle, 9... Elastic material.
Claims (1)
気的に固定してなる圧電磁器波器を液状のシリ
コンゴム等の弾性材料で覆い、この後前記弾性材
料が硬化する前に前記圧電素子の近辺に先端が到
達するように細いノズルを差込み、ノズルを介し
て空気を供給することにより前記圧電素子周辺の
弾性材料を排除して空間を形成し、この後ノズル
を抜き取り弾性材料を硬化せしめることを特徴と
する圧電磁器波器の製造法。1. A piezoelectric ceramic wave device consisting of a piezoelectric element mechanically and electrically fixed between electrodes on an insulating substrate is covered with an elastic material such as liquid silicone rubber, and then the piezoelectric element is fixed before the elastic material hardens. A thin nozzle is inserted so that the tip reaches near the piezoelectric element, and by supplying air through the nozzle, the elastic material around the piezoelectric element is removed to form a space, and the nozzle is then removed to harden the elastic material. A method for manufacturing a piezoelectric ceramic wave vessel characterized by the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648578A JPS5513581A (en) | 1978-07-14 | 1978-07-14 | Production of piezo-electric porcelain filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648578A JPS5513581A (en) | 1978-07-14 | 1978-07-14 | Production of piezo-electric porcelain filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5513581A JPS5513581A (en) | 1980-01-30 |
| JPS6217404B2 true JPS6217404B2 (en) | 1987-04-17 |
Family
ID=13888271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8648578A Granted JPS5513581A (en) | 1978-07-14 | 1978-07-14 | Production of piezo-electric porcelain filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5513581A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04113203U (en) * | 1991-03-22 | 1992-10-02 | 八世位 丸山 | Anti-slip chain for tires |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5994911A (en) * | 1982-11-19 | 1984-05-31 | Matsushita Electric Ind Co Ltd | Manufacture of composite type ceramic resonator |
| JPH02312310A (en) * | 1989-05-27 | 1990-12-27 | Murata Mfg Co Ltd | Piezoelectric parts and manufacture thereof |
| US5410789A (en) * | 1992-11-13 | 1995-05-02 | Murata Manufacturing Co., Ltd. | Method of manufacturing piezoelectric-resonator having vibrating spaces formed therein |
| US5838092A (en) * | 1995-09-01 | 1998-11-17 | The Penn State Research Foundation | Apparatus and method for vibration control using active constrained layer edge elements |
-
1978
- 1978-07-14 JP JP8648578A patent/JPS5513581A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04113203U (en) * | 1991-03-22 | 1992-10-02 | 八世位 丸山 | Anti-slip chain for tires |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5513581A (en) | 1980-01-30 |
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