JPS54139481A - Pressing/heating process device for semiconductor substrate - Google Patents

Pressing/heating process device for semiconductor substrate

Info

Publication number
JPS54139481A
JPS54139481A JP4670978A JP4670978A JPS54139481A JP S54139481 A JPS54139481 A JP S54139481A JP 4670978 A JP4670978 A JP 4670978A JP 4670978 A JP4670978 A JP 4670978A JP S54139481 A JPS54139481 A JP S54139481A
Authority
JP
Japan
Prior art keywords
pressure
barrel
capsule
detector
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4670978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5628014B2 (enrdf_load_stackoverflow
Inventor
Mikio Takagi
Mamoru Maeda
Haruo Shimoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4670978A priority Critical patent/JPS54139481A/ja
Publication of JPS54139481A publication Critical patent/JPS54139481A/ja
Publication of JPS5628014B2 publication Critical patent/JPS5628014B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
JP4670978A 1978-04-21 1978-04-21 Pressing/heating process device for semiconductor substrate Granted JPS54139481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4670978A JPS54139481A (en) 1978-04-21 1978-04-21 Pressing/heating process device for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4670978A JPS54139481A (en) 1978-04-21 1978-04-21 Pressing/heating process device for semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS54139481A true JPS54139481A (en) 1979-10-29
JPS5628014B2 JPS5628014B2 (enrdf_load_stackoverflow) 1981-06-29

Family

ID=12754878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4670978A Granted JPS54139481A (en) 1978-04-21 1978-04-21 Pressing/heating process device for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS54139481A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169207U (enrdf_load_stackoverflow) * 1984-10-13 1986-05-12
JPS6394904U (enrdf_load_stackoverflow) * 1986-12-05 1988-06-18

Also Published As

Publication number Publication date
JPS5628014B2 (enrdf_load_stackoverflow) 1981-06-29

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