JPS54137278A - Manufacture of emulsion photo mask - Google Patents
Manufacture of emulsion photo maskInfo
- Publication number
- JPS54137278A JPS54137278A JP4485378A JP4485378A JPS54137278A JP S54137278 A JPS54137278 A JP S54137278A JP 4485378 A JP4485378 A JP 4485378A JP 4485378 A JP4485378 A JP 4485378A JP S54137278 A JPS54137278 A JP S54137278A
- Authority
- JP
- Japan
- Prior art keywords
- solution
- photo mask
- development
- plate
- emulsion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To avoid the uneven devolopment or the faulty development and thus to obtain a high-quality mask by giving the ultrasonic wave to the developing solution when forming the photo mask through exposure and development applied to the emulsion layer provided on the transparent substrate.
CONSTITUTION: Ultrasonic wave generator 4 is coupled to developing solution tank 2 storing developing solution 3, and dry plate 1 composed of the emulsion layer as well as the transparent substrate which is through with the exposure process are soaked into solution 3. Then generator 4 is actuated to stip up solution 3, and at the same time, the ultrasonic vibrarions are applied to plate 1 through solution 3. In such way, new solution 3 is always through plate 1, thus reducing extremely the occurrence of pinholes and uneven development. Thus, a high-quality emulsion photo mask can be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4485378A JPS54137278A (en) | 1978-04-18 | 1978-04-18 | Manufacture of emulsion photo mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4485378A JPS54137278A (en) | 1978-04-18 | 1978-04-18 | Manufacture of emulsion photo mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54137278A true JPS54137278A (en) | 1979-10-24 |
Family
ID=12703033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4485378A Pending JPS54137278A (en) | 1978-04-18 | 1978-04-18 | Manufacture of emulsion photo mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54137278A (en) |
-
1978
- 1978-04-18 JP JP4485378A patent/JPS54137278A/en active Pending
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