JPS54134982A - Detector for street position on semiconductor wafer - Google Patents

Detector for street position on semiconductor wafer

Info

Publication number
JPS54134982A
JPS54134982A JP4211578A JP4211578A JPS54134982A JP S54134982 A JPS54134982 A JP S54134982A JP 4211578 A JP4211578 A JP 4211578A JP 4211578 A JP4211578 A JP 4211578A JP S54134982 A JPS54134982 A JP S54134982A
Authority
JP
Japan
Prior art keywords
wafer
street
semiconductor wafer
basis
detect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4211578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152979B2 (enrdf_load_stackoverflow
Inventor
Yukio Kenbo
Tomohiro Kuji
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4211578A priority Critical patent/JPS54134982A/ja
Priority to US05/964,353 priority patent/US4213117A/en
Publication of JPS54134982A publication Critical patent/JPS54134982A/ja
Publication of JPS6152979B2 publication Critical patent/JPS6152979B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Dicing (AREA)
JP4211578A 1977-11-28 1978-04-12 Detector for street position on semiconductor wafer Granted JPS54134982A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4211578A JPS54134982A (en) 1978-04-12 1978-04-12 Detector for street position on semiconductor wafer
US05/964,353 US4213117A (en) 1977-11-28 1978-11-28 Method and apparatus for detecting positions of chips on a semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4211578A JPS54134982A (en) 1978-04-12 1978-04-12 Detector for street position on semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS54134982A true JPS54134982A (en) 1979-10-19
JPS6152979B2 JPS6152979B2 (enrdf_load_stackoverflow) 1986-11-15

Family

ID=12626944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4211578A Granted JPS54134982A (en) 1977-11-28 1978-04-12 Detector for street position on semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54134982A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788414A (en) * 1980-11-21 1982-06-02 Seiko Epson Corp Alignment device
JP2012250338A (ja) * 2011-06-07 2012-12-20 Disco Corp 加工装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788414A (en) * 1980-11-21 1982-06-02 Seiko Epson Corp Alignment device
JP2012250338A (ja) * 2011-06-07 2012-12-20 Disco Corp 加工装置

Also Published As

Publication number Publication date
JPS6152979B2 (enrdf_load_stackoverflow) 1986-11-15

Similar Documents

Publication Publication Date Title
JPS52109875A (en) Position matching system for mask and wafer and its unit
JPS57153433A (en) Manufacturing device for semiconductor
JPS5598842A (en) Position detection system
JPS6360401B2 (enrdf_load_stackoverflow)
JPS57188004A (en) Automatic focusing zoom lens
JPS6453418A (en) Wafer aligning system
JPS5295221A (en) Detector for focusing
JPS5671173A (en) Pattern detection method of printed circuit substrate
JPS54134982A (en) Detector for street position on semiconductor wafer
JPS5697325A (en) Focus detecting method of camera
JPS5371850A (en) Position detector
JPS5511343A (en) Position detecting device
JPS5538003A (en) Rectilinear pattern detecting device
JPS5429977A (en) Detection system for position
JPS5474678A (en) Detection method of chip location on semiconductor wafer
JPS5496374A (en) Automatic positioning device
JPS5538002A (en) Dicing line monitoring device
JPS57118105A (en) Detector
JPS5636139A (en) Detecting method for substrate of semiconductor device
JPS5745477A (en) Target acquisition system
JPS5541668A (en) Detecting method of character position
JPS5232324A (en) Photoelectric detecting device for in or out of focus in the optical s ystem
JPS5536730A (en) Displaced position detector
JPS5629110A (en) Distance measurement unit
JPS57153432A (en) Reducing projecting exposing device